Teruyuki Watanabe | Researchain

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Featured researches published by Teruyuki Watanabe.

Archive | 2003

Substrate processing apparatus and method for processing substrate

Seiji Katsuoka; Masahiko Sekimoto; Toshio Yokoyama; Teruyuki Watanabe; Takahiro Ogawa; Kenichi Kobayashi; Mitsuru Miyazaki; Yasuyuki Motoshima; Akira Owatari; Naoki Dai

Archive | 2009

Substrate polishing apparatus and method

Seiji Katsuoka; Masahiko Sekimoto; Junji Kunisawa; Mitsuru Miyazaki; Teruyuki Watanabe; Kenichi Kobayashi; Masayuki Kumekawa; Toshio Yokoyama

Archive | 2004

Substrate processing method and apparatus

Seiji Katsuoka; Masahiko Sekimoto; Toshio Yokoyama; Teruyuki Watanabe; Takahiro Ogawa; Kenichi Kobayashi; Mitsuru Miyazaki; Yasuyuki Motojima

Archive | 2005

Substrate processing unit and substrate processing apparatus

Seiji Katsuoka; Masahiko Sekimoto; Teruyuki Watanabe; Ryo Kato; Toshio Yokoyama; Kenichi Suzuki; Kenichi Kobayashi

Archive | 2006

SUBSTRATE PROCESSING UNIT, SUBSTRATE TRANSFER METHOD, SUBSTRATE CLEANSING PROCESS UNIT, AND SUBSTRATE PLATING APPARATUS

Masahiko Sekimoto; Toshio Yokoyama; Teruyuki Watanabe; Kenichi Suzuki; Kenichi Kobayashi; Ryo Kato

Archive | 2007

SUBSTRATE HOLDING DEVICE, SUBSTRATE TREATMENT DEVICE, AND SUBSTRATE MOUNTING/DISMOUNTING METHOD TO/FROM SUBSTRATE HOLDING DEVICE

Naoki Dai; Seiji Katsuoka; Kenichi Kobayashi; Mitsuru Miyazaki; Yasuyuki Motojima; Takahiro Ogawa; Akira Owatari; Masahiko Sekimoto; Teruyuki Watanabe; Toshio Yokoyama; 誠司勝岡; 直樹大; 充宮崎; 貴弘小川; 賢一小林; 晃尾渡; 靖之本島; 俊夫横山; 輝行渡邉; 雅彦関本

Archive | 2007

Substrate polishing device, substrate polishing method, and substrate receiving method

Seiji Katsuoka; Kenichi Kobayashi; Masayuki Kumegawa; Junji Kunisawa; Mitsuru Miyazaki; Masahiko Sekimoto; Teruyuki Watanabe; Toshio Yokoyama; 誠司勝岡; 淳次國澤; 充宮崎; 賢一小林; 俊夫横山; 輝行渡邉; 正行粂川; 雅彦関本

Archive | 2004

Substrate holding apparatus, substrate holding method, and substrate processing apparatus

Masahiko Sekimoto; Seiji Katsuoka; Naoki Dai; Teruyuki Watanabe; Takahiro Ogawa; Kenichi Suzuki; Kenichi Kobayashi; Yasuyuki Motoshima; Ryo Kato

Archive | 2010

Substrate supporting apparatus and substrate supporting method

Akira Kato; Seiji Katsuoka; Kenichi Kobayashi; Masahiko Sekimoto; Kenichi Suzuki; Teruyuki Watanabe; Toshio Yokoyama; 亮加藤; 誠司勝岡; 賢一小林; 俊夫横山; 輝行渡邉; 憲一鈴木; 雅彦関本

Archive | 2007