Seiji Katsuoka | Researchain

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Featured researches published by Seiji Katsuoka.

Archive | 1995

Dressing apparatus and method

Seiji Katsuoka; Kunihiko Sakurai; Tetsuji Togawa

Archive | 2004

Substrate holder, plating apparatus, and plating method

Junichiro Yoshioka; Seiji Katsuoka; Masahiko Sekimoto; Yasuhiko Endo; Yugang Guo

Archive | 2009

Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method

Mitsuru Miyazaki; Seiji Katsuoka; Naoki Matsuda; Junji Kunisawa; Kenichi Kobayashi; Hiroshi Sotozaki; Hiroyuki Shinozaki; Osamu Nabeya; Shinya Morisawa; Takahiro Ogawa; Natsuki Makino

Archive | 2003

Substrate processing apparatus and method for processing substrate

Seiji Katsuoka; Masahiko Sekimoto; Toshio Yokoyama; Teruyuki Watanabe; Takahiro Ogawa; Kenichi Kobayashi; Mitsuru Miyazaki; Yasuyuki Motoshima; Akira Owatari; Naoki Dai

Archive | 2000

Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof

Seiji Katsuoka; Hozumi Yasuda; Tadakazu Sone; Shunichiro Kojima; Manabu Tsujimura

Archive | 2005

Substrate cleaning processing apparatus and substrate processing unit

Seiji Katsuoka; Kazuaki Maeda; Takahiro Ogawa; Kaoru Yamada; Toshio Yokoyama; 和昭前田; 誠司勝岡; 貴弘小川; かおる山田; 俊夫横山

Archive | 2005

Substrate Cleaning Apparatus and Substrate Processing Unit

Toshi Yokoyama; Seiji Katsuoka; Takahiro Ogawa; Kaoru Yamada; Kazuaki Maeda

Archive | 2009

Substrate polishing apparatus and method

Seiji Katsuoka; Masahiko Sekimoto; Junji Kunisawa; Mitsuru Miyazaki; Teruyuki Watanabe; Kenichi Kobayashi; Masayuki Kumekawa; Toshio Yokoyama

Archive | 2004

Electrolytic processing apparatus and substrate processing method

Hidenao Suzuki; Kazufumi Nomura; Kunihito Ide; Hiroyuki Kanda; Koji Mishima; Naoki Mihara; Natsuki Makino; Seiji Katsuoka

Archive | 2004

Plating apparatus, plating method and substrate processing apparatus

Tsutomu Nakada; Junji Kunisawa; Hiroyuki Kanda; Mizuki Nagai; Satoru Yamamoto; Koji Mishima; Shinya Morisawa; Seiji Katsuoka; Natsuki Makino; Yukio Fukunaga

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