Tetsuhiro Tanaka | Researchain

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Featured researches published by Tetsuhiro Tanaka.

Archive | 2011

Nonvolatile semiconductor memory device and manufacturing method thereof, semiconductor device and manufacturing method thereof, and manufacturing method of insulating film

Tetsuya Kakehata; Tetsuhiro Tanaka; Yoshinobu Asami

Archive | 2011

Method for manufacturing microcrystalline semiconductor film and method for manufacturing semiconductor device

Tetsuhiro Tanaka; Tomokazu Yokoi; Koji Dairiki

Archive | 2008

Semiconductor substrate and manufacturing method of semiconductor device

Shunpei Yamazaki; Mitsuhiro Ichijo; Makoto Furuno; Takashi Ohtsuki; Kenichi Okazaki; Tetsuhiro Tanaka; Seiji Yasumoto

Japanese Journal of Applied Physics | 2014

Low turn-on voltage due to conduction band lowering effect in crystalline indium gallium zinc oxide transistors

Daisuke Matsubayashi; Yoshiyuki Kobayashi; Shinpei Matsuda; Toshimitsu Obonai; Noritaka Ishihara; Tetsuhiro Tanaka; Sachiaki Tezuka; Hideomi Suzawa; Shunpei Yamazaki

Archive | 2007

Non-volatile semiconductor storage device and manufacturing method thereof, semiconductor device and manufacturing method thereof, and method for manufacturing insulating film

Yoshinobu Asami; Tetsuya Kakehata; Tetsuhiro Tanaka; 哲弥掛端; 良信浅見; 哲弘田中

Archive | 2012

Microcrystalline semiconductor film, method for manufacturing the same, and method for manufacturing semiconductor device

Tetsuhiro Tanaka; Takashi Ienaga; Ryu Komatsu; Erika Kato; Ryota Tajima; Yasuhiro Jinbo

Archive | 2010

Method for forming microcrystalline semiconductor film and method for manufacturing thin film transistor

Ryota Tajima; Tetsuhiro Tanaka; Ryo Tokumaru; Hidekazu Miyairi; Mitsuhiro Ichijo; Taichi Nozawa

Archive | 2014

Oxide semiconductor thin film transistor with reduced impurity diffusion

Hideomi Suzawa; Tetsuhiro Tanaka; Yuhei Sato; Sachiaki Tezuka; Shunpei Yamazaki

SID Symposium Digest of Technical Papers | 2013

P.10: WITHDRAWN: P.11: Recognition of Existence of n‐type IGZO Layer in CAAC‐IGZO Film under Source and Drain Electrode Made of Tungsten

Ryo Tokumaru; Masashi Tsubuku; Yasumasa Yamane; Takayuki Inoue; Tetsuhiro Tanaka; Daisuke Matsubayashi; Hideomi Suzawa; Shunpei Yamazaki; Yasutaka Nakazawa; Masami Jintyou; Hiroshi Matsukizono; Akihiro Oda; Shigeyasu Mori; Takuya Matsuo

Archive | 2012