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Dive into the research topics where Tetsuo Izawa is active.

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Featured researches published by Tetsuo Izawa.


Applied Physics Letters | 1984

Melt‐width enhancement in the recrystallization of polycrystalline silicon‐on‐insulator by twin‐laser‐beam‐induced substrate interheating

Nobuo Sasaki; Ryoichi Mukai; Tetsuo Izawa; Motoo Nakano; Mikio Takagi

A new method to recrystallize polycrystalline silicon on amorphous insulating layers is developed using twin cw argon laser beams. It is found that the melt width of twin beams can exceed that of a single beam by a factor of 4. This effect is explained by a model of substrate interheating between twin laser spots. Using this technique, a large silicon single crystalline grain as large as 1.8 mm long and 20 μm wide was obtained on thermal oxide coated silicon wafers even for the substrate kept at room temperature during laser irradiation.


Archive | 1995

Method of making a semiconductor device having a silicide local interconnect

Hiromi Hayashi; Atsuo Fushida; Tetsuo Izawa; Masaki Katsube; Tatsuya Yamazaki


Archive | 2002

Semiconductor device and fabrication process thereof

Tetsuo Yoshimura; Shinji Kuzuya; Kazuo Sukegawa; Tetsuo Izawa


Archive | 1993

Double gate FET and process for manufacturing same

Shinichi Kawai; Tetsuo Izawa


Archive | 2004

Semiconductor device and method for fabricating the same including interconnection of two electrodes

Yasunori Iriyama; Tetsuo Izawa


Archive | 1996

Fabrication process of a semiconductor integrated circuit device having a local interconnect pattern and a semiconductor integrated circuit device fabricated according to such a fabrication process

Tetsuo Izawa; Hiroshi Goto; Koichi Hashimoto


Archive | 1995

Enhanced semiconductor integrated circuit device with a memory array and a peripheral circuit

Tetsuo Izawa; Hiroshi Goto; Koichi Hashimoto


IEEE Electron Device Letters | 1993

21-ps 0.1- mu m CMOS devices operating at room temperature

Tetsuo Izawa; Koh Watanabe; Seiichiro Kawamura


Archive | 1994

Method for wiring integrated circuit device

Hiroshi Goto; Tetsuo Izawa; 哲夫 伊澤; 広志 後藤


The Japan Society of Applied Physics | 1984

SOI / CMOS Gate Array by Laser Recrystallization

Tetsuo Izawa; Seiichiro Kawamura; Nobuo Sasaki; Motoo Nakano; Kunihiko Wada; Mitsumasa Ashida

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