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Tetsuya Miyashita

Tokyo Electron

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Publication

Featured researches published by Tetsuya Miyashita.

Archive | 2009

Processing apparatus using source gas and reactive gas

Masayuki Tanaka; Kouzo Kai; Seischi Murakami; Tetsuya Miyashita

Archive | 2004

Treating device using raw material gas and reactive gas

Masayuki Tanaka; Kouzo Kai; Seishi Murakami; Tetsuya Miyashita

Archive | 2013

Vacuum-Processing Apparatus, Vacuum-Processing Method, and Storage Medium

Shinji Furukawa; Atsushi Gomi; Tetsuya Miyashita; Toru Kitada; Kanto Nakamura

Archive | 2013

MAGNETRON SPUTTERING APPARATUS AND METHOD

Shigeru Mizuno; Hiroyuki Toshima; Atsushi Gomi; Tetsuya Miyashita; Tatsuo Hatano; Yasushi Mizusawa

Archive | 2015

COOLING PROCESSING APPARATUS AND METHOD FOR OPERATING THE SAME

Tetsuya Miyashita; Masamichi Hara; Naoyuki Suzuki; Kaoru Yamamoto; Kouji Maeda

Archive | 2012

GATE VALVE UNIT, SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD THEREOF

Kaoru Yamamoto; Masamichi Hara; Tetsuya Miyashita

Archive | 2009

METHOD OF SEPARATING WORKPIECE, AND WORKPIECE PROCESSING DEVICE

Nobuki Kimura; Tetsuya Miyashita; Takashi Sakuma; 隆司 佐久間; 哲也 宮下; 延樹 木村

Archive | 2008

Substrate processing apparatus and processing method thereof, and storage medium

Masamichi Hara; Toshiharu Hirata; Tetsuya Miyashita; 正道 原; 哲也 宮下; 俊治 平田

Archive | 2008

METHOD FOR REGENERATING GAS-STORAGE TYPE VACUUM PUMPING SYSTEM AND METHOD FOR CONTROLLING SUBSTRATE-TREATING APPARATUS USING THE SAME

Masamichi Hara; Toshiharu Hirata; Tetsuya Miyashita; 正道 原; 哲也 宮下; 俊治 平田

Archive | 2017

MOUNTING TABLE SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD

Tadashi Mitsunaga; Tetsuya Miyashita; Tatsuo Hatano; Naoki Watanabe

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Collaboration

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Masamichi Hara

Tokyo Electron

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Kouzo Kai

Tokyo Electron

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Masayuki Tanaka

Tokyo Electron

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Seishi Murakami

Tokyo Electron

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Atsushi Gomi

Tokyo Electron

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Kanto Nakamura

Tokyo Electron

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Kaoru Yamamoto

Tokyo Electron

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Tatsuo Hatano

Tokyo Electron

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Toru Kitada

Tokyo Electron

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Hiroyuki Toshima

Tokyo Electron

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