Is this you? Create Your Porfile
Avatar

Atsushi Gomi

IBM

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Atsushi Gomi is active.

Explore More

Publication

Featured researches published by Atsushi Gomi.

Archive | 2006

Method and apparatus for reducing particle formation in a vapor distribution system

Kenji Suzuki; Atsushi Gomi; Masamichi Hara; Yasushi Mizusawa

Archive | 2005

Method of depositing metal layers from metal-carbonyl precursors

Hideaki Yamasaki; Tsukasa Matsuda; Atsushi Gomi; Tatsuo Hatano; Masahito Sugiura; Yumiko Kawano; Gert J. Leusink; F. R. McFeely; Sandra G. Malhotra

Archive | 2003

Low-pressure deposition of metal layers from metal-carbonyl precursors

Hideaki Yamasaki; Tsukasa Matsuda; Atsushi Gomi; Tatsuo Hatano; Masahito Sugiura; Yumiko Kawano; Gert J. Leusink; F. R. McFeely; Sandra G. Malhotra

Archive | 2003

Method of forming a metal layer using an intermittent precursor gas flow process

Hideaki Yamasaki; Tsukasa Matsuda; Atsushi Gomi; Tatsuo Hatano; Mitsuhiro Tachibana; Koumei Matsuzava; Yumiko Kawano; Gert J. Leusink; F. R. McFeely; Sandra G. Malhotra; Andrew H. Simon; John J. Yurkas

Microelectronic Engineering | 2012

Bottom up deposition of advanced iPVD Cu process integrated with iPVD Ti and CVD Ru

Tadahiro Ishizaka; Takashi Sakuma; Masaya Kawamata; Osamu Yokoyama; Takara Kato; Atsushi Gomi; Chiaki Yasumuro; Hiroyuki Toshima; Toshihiko Fukushima; Yasushi Mizusawa; Tatsuo Hatano; Masamichi Hara

Archive | 2012

Method for forming copper wire

Takara Kato; 多佳良 加藤; Tadahiro Ishizaka; 石坂 忠大; Atsushi Gomi; 五味 淳; Tatsuo Hatano; 波多野 達夫; Yasushi Mizusawa; 寧 水澤

Archive | 2014

Cu WIRING FORMATION METHOD

Tadahiro Ishizaka; 忠大 石坂; Atsushi Gomi; 淳 五味; Kenji Suzuki; 健二 鈴木; Tatsuo Hatano; 達夫 波多野; Hiroshi Toshima; 宏 戸島; Yasushi Mizusawa; 寧 水澤

Archive | 2013

MAGNETRON SPUTTERING APPARATUS AND METHOD

Shigeru Mizuno; Hiroyuki Toshima; Atsushi Gomi; Tetsuya Miyashita; Tatsuo Hatano; Yasushi Mizusawa

Archive | 2012

Substrate placing mechanism, substrate processing apparatus, method for suppressing film deposition on substrate placing mechanism

Masamichi Hara; Atsushi Gomi; Shinji Maekawa; Satoshi Taga; Kaoru Yamamoto

Archive | 2010

Substrate placing mechanism and substrate processing apparatus

Masamichi Hara; Atsushi Gomi; Shinji Maekawa; Satoshi Taga

Explore More

Collaboration

Dive into the Atsushi Gomi's collaboration.

Top Co-Authors
Avatar

Masamichi Hara

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Tatsuo Hatano

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Yasushi Mizusawa

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

F. R. McFeely

IBM

View shared research outputs
Top Co-Authors
Avatar

Sandra G. Malhotra

IBM

View shared research outputs
Top Co-Authors
Avatar

Tsukasa Matsuda

IBM

View shared research outputs
Top Co-Authors
Avatar

Satoshi Taga

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Shinji Maekawa

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Gert J. Leusink

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hideaki Yamasaki

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge