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Dive into the research topics where Atsushi Gomi is active.

Publication


Featured researches published by Atsushi Gomi.


Archive | 2006

Method and apparatus for reducing particle formation in a vapor distribution system

Kenji Suzuki; Atsushi Gomi; Masamichi Hara; Yasushi Mizusawa


Archive | 2005

Method of depositing metal layers from metal-carbonyl precursors

Hideaki Yamasaki; Tsukasa Matsuda; Atsushi Gomi; Tatsuo Hatano; Masahito Sugiura; Yumiko Kawano; Gert J. Leusink; F. R. McFeely; Sandra G. Malhotra


Archive | 2003

Low-pressure deposition of metal layers from metal-carbonyl precursors

Hideaki Yamasaki; Tsukasa Matsuda; Atsushi Gomi; Tatsuo Hatano; Masahito Sugiura; Yumiko Kawano; Gert J. Leusink; F. R. McFeely; Sandra G. Malhotra


Archive | 2003

Method of forming a metal layer using an intermittent precursor gas flow process

Hideaki Yamasaki; Tsukasa Matsuda; Atsushi Gomi; Tatsuo Hatano; Mitsuhiro Tachibana; Koumei Matsuzava; Yumiko Kawano; Gert J. Leusink; F. R. McFeely; Sandra G. Malhotra; Andrew H. Simon; John J. Yurkas


Microelectronic Engineering | 2012

Bottom up deposition of advanced iPVD Cu process integrated with iPVD Ti and CVD Ru

Tadahiro Ishizaka; Takashi Sakuma; Masaya Kawamata; Osamu Yokoyama; Takara Kato; Atsushi Gomi; Chiaki Yasumuro; Hiroyuki Toshima; Toshihiko Fukushima; Yasushi Mizusawa; Tatsuo Hatano; Masamichi Hara


Archive | 2012

Method for forming copper wire

Takara Kato; 多佳良 加藤; Tadahiro Ishizaka; 石坂 忠大; Atsushi Gomi; 五味 淳; Tatsuo Hatano; 波多野 達夫; Yasushi Mizusawa; 寧 水澤


Archive | 2014

Cu WIRING FORMATION METHOD

Tadahiro Ishizaka; 忠大 石坂; Atsushi Gomi; 淳 五味; Kenji Suzuki; 健二 鈴木; Tatsuo Hatano; 達夫 波多野; Hiroshi Toshima; 宏 戸島; Yasushi Mizusawa; 寧 水澤


Archive | 2013

MAGNETRON SPUTTERING APPARATUS AND METHOD

Shigeru Mizuno; Hiroyuki Toshima; Atsushi Gomi; Tetsuya Miyashita; Tatsuo Hatano; Yasushi Mizusawa


Archive | 2012

Substrate placing mechanism, substrate processing apparatus, method for suppressing film deposition on substrate placing mechanism

Masamichi Hara; Atsushi Gomi; Shinji Maekawa; Satoshi Taga; Kaoru Yamamoto


Archive | 2010

Substrate placing mechanism and substrate processing apparatus

Masamichi Hara; Atsushi Gomi; Shinji Maekawa; Satoshi Taga

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