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Thomas Laursen

Eaton Corporation

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Publication

Featured researches published by Thomas Laursen.

Archive | 2000

Multiprobe detection system for chemical-mechanical planarization tool

Matthew Weldon; Thomas Laursen; Malcolm K. Grief; Paul Holzapfel; Mark A. Meloni; Robert Eaton

Archive | 1999

Two-step chemical-mechanical planarization for damascene structures on semiconductor wafers

Thomas Laursen; Malcolm K. Grief; Krishna P. Murella; Sanjay Basak

Journal of Electronic Materials | 2002

Characterization and optimization of Copper chemical mechanical planarization

Thomas Laursen; Malcolm K. Grief

Archive | 2006

Method for polishing copper on a workpiece surface

Julia Svirchevski; Saket Chadda; Ismail Emesh; Thomas Laursen; Bentley J. Palmer; Sanjay Basak; Krishna P. Murella

Archive | 1999

Pad conditioning for copper-based semiconductor wafers

Thomas Laursen; Malcolm K. Grief; Krishna P. Murella; Sanjay Basak

Archive | 2000

Method for conditioning a pad used for polishing a for copper-based semiconductor wafer

Thomas Laursen; Malcolm K. Grief; Sanjay Basak; Krishna P. Murella

MRS Proceedings | 2001

Multiprobe End-Point Detection for Precision Control of the Copper CMP Process

Thomas Laursen; Malcolm K. Grief

Archive | 2000

Zweistufiges chemisch-mechanisches Verfahren zum ebnen für Damascene-Strukturen auf Halbleiter-Wafern

Thomas Laursen; Krishna P. Murella; Malcolm K. Grief; Sanja Basak

Archive | 2000

Zweistufiges chemisch-mechanisches Verfahren zum ebnen für Damascene-Strukturen auf Halbleiter-Wafern Two-stage chemical-mechanical method for paving for damascene structures on semiconductor wafers

Thomas Laursen; Krishna P. Murella; Malcolm K. Grief; Sanja Basak

Archive | 2000

Procede pour remettre en etat un tampon servant a polir une plaquette a semi conducteurs en cuivre

Thomas Laursen; Malcolm K. Grief; Sanjay Basak; Krishna P. Murella

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Collaboration

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Malcolm K. Grief

Eaton Corporation

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Krishna P. Murella

Air Products

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Mark A. Meloni

Eaton Corporation

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Matthew Weldon

Eaton Corporation

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Paul Holzapfel

Eaton Corporation

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Robert Eaton

Eaton Corporation

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