Tianquan Su

Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test

Abstract. A software configurable optical test system (SCOTS) based on deflectometry was developed at the University of Arizona for rapidly, robustly, and accurately measuring precision aspheric and freeform surfaces. SCOTS uses a camera with an external stop to realize a Hartmann test in reverse. With the external camera stop as the reference, a coordinate measuring machine can be used to calibrate the SCOTS test geometry to a high accuracy. Systematic errors from the camera are carefully investigated and controlled. Camera pupil imaging aberration is removed with the external aperture stop. Imaging aberration and other inherent errors are suppressed with an N-rotation test. The performance of the SCOTS test is demonstrated with the measurement results from a 5-m-diameter Large Synoptic Survey Telescope tertiary mirror and an 8.4-m diameter Giant Magellan Telescope primary mirror. The results show that SCOTS can be used as a large-dynamic-range, high-precision, and non-null test method for precision aspheric and freeform surfaces. The SCOTS test can achieve measurement accuracy comparable to traditional interferometric tests.

SCOTS: a reverse Hartmann test with high dynamic range for GiantMagellan Telescope primary mirror segments

A software configurable optical test system (SCOTS) based on fringe reflection was implemented for measuring the primary mirror segments of the Giant Magellan Telescope (GMT). The system uses modulated fringe patterns on an LCD monitor as the source, and captures data with a CCD camera and calibrated imaging optics. The large dynamic range of SCOTS provides good measurement of regions with large slopes that cannot be captured reliably with interferometry. So the principal value of the SCOTS test for GMT is to provide accurate measurements that extend clear to the edge of the glass, even while the figure is in a rough state of figure, where the slopes are still high. Accurate calibration of the geometry and the mapping also enable the SCOTS test to achieve accuracy that is comparable measurement accuracy to the interferometric null test for the small- and middle- spatial scale errors in the GMT mirror.

Measuring rough optical surfaces using scanning long-wave optical test system. 1. Principle and implementation

Current metrology tools have limitations when measuring rough aspherical surfaces with 1-2 μm root mean square roughness; thus, the surface cannot be shaped accurately by grinding. To improve the accuracy of grinding, the scanning long-wave optical test system (SLOTS) has been developed to measure rough aspherical surfaces quickly and accurately with high spatial resolution and low cost. It is a long-wave infrared deflectometry device consisting of a heated metal ribbon and an uncooled thermal imaging camera. A slope repeatability of 13.6 μrad and a root-mean-square surface accuracy of 31 nm have been achieved in the measurements of two 4 inch spherical surfaces. The shape of a rough surface ground with 44 μm grits was also measured, and the result matches that from a laser tracker measurement. With further calibration, SLOTS promises to provide robust guidance through the grinding of aspherics.

Instrument transfer function of slope measuring deflectometry systems.

Slope measuring deflectometry (SMD) systems are developing rapidly in testing freeform optics. They measure the surface slope using a camera and an incoherent source. The principle of the test is mainly discussed in geometric optic domain. The system response as a function of spatial frequency or instrument transfer function (ITF) has yet to be studied thoroughly. Through mathematical modeling, simulation, and experiment we show that the ITF of an SMD system is very close to the modulation transfer function of the camera used. Furthermore, the ITF can be enhanced using a deconvolution filter. This study will lead to more accurate measurements in SMD and will show the physical optics nature of these tests.

Precision aspheric optics testing with SCOTS: A deflectometry approach

Absolute measurement with SCOTS/deflectometry is a calibration problem. We use a laser tracker to calibrate the test geometry. The performance id demonstrated with the initial measurement results from the Large Synoptic Survey Telescope tertiary mirror. Systematic errors from the camera are carefully controlled. Camera pupil imaging aberration is removed with an external aperture stop. Imaging aberration and other inherent errors are suppressed with a rotation test. Results show that the SCOTS can act as a large dynamic range, high precision, non-null test method for precision aspheric optics. The SCOTS test can achieve measurement accuracy comparable with the traditional interferometric testing.

Scanning Long-wave Optical Test System - a new ground optical surface slope test system

The scanning long-wave optical test system (SLOTS) is under development at the University of Arizona to provide rapid and accurate measurements of aspherical optical surfaces during the grinding stage. It is based on the success of the software configurable optical test system (SCOTS) which uses visible light to measure surface slopes. Working at long wave infrared (LWIR, 7-14 μm), SLOTS measures ground optical surface slopes by viewing the specular reflection of a scanning hot wire. A thermal imaging camera collects data while motorized stages scan the wire through the field. Current experiments show that the system can achieve a high precision at micro-radian level with fairly low cost equipment. The measured surface map is comparable with interferometer for slow optics. This IR system could be applied early in the grinding stage of fabrication of large telescope mirrors to minimize the surface shape error imparted during processing. This advantage combined with the simplicity of the optical system (no null optics, no high power carbon dioxide laser) would improve the efficiency and shorten the processing time.

Measuring large mirrors using SCOTS: the Software Configurable Optical Test System

Large telescope mirrors are typically measured using interferometry, which can achieve measurement accuracy of a few nanometers. However, applications of interferometry can be limited by small dynamic range, sensitivity to environment, and high cost. We have developed a range of surface measurement solutions using SCOTS, the Software Configurable Optical Test System, which illuminates the surface under test with light modulated from a digital display or moving source. The reflected light is captured and used to determine the surface slope which is integrated to provide the shape. A range of systems is presented that measures nearly all spatial scales and supports all phases of processing for large telescope mirrors.

Fabrication and testing of 4.2m off-axis aspheric primary mirror of Daniel K. Inouye Solar Telescope

Daniel K. Inouye Solar Telescope (formerly known as Advanced Technology Solar Telescope) will be the largest optical solar telescope ever built to provide greatly improved image, spatial and spectral resolution and to collect sufficient light flux of Sun. To meet the requirements of the telescope the design adopted a 4m aperture off-axis parabolic primary mirror with challenging specifications of the surface quality including the surface figure, irregularity and BRDF. The mirror has been completed at the College of Optical Sciences in the University of Arizona and it meets every aspect of requirement with margin. In fact this mirror may be the smoothest large mirror ever made. This paper presents the detail fabrication process and metrology applied to the mirror from the grinding to finish, that include extremely stable hydraulic support, IR and Visible deflectometry, Interferometry and Computer Controlled fabrication process developed at the University of Arizona.

Study of the instrument transfer function of a free-form optics metrology system: SCOTS

ITF is usually over looked during the deflectometry measurements, especially when low spatial frequency errors are the main test focus. However, real data shows that the effect of ITF cannot be ignored to reach high accuracy measurements of high spatial frequency features. We illustrated with simulation that ITF of SCOTS is proportional to the camera imaging MTF. We then applied this result to the edge measurement data of a large mirror, where a better agreement is achieved between SCOTS test and a test-plate interferometric test after the compensation. Experimental verification of the ITF theory for deflectometry is preliminary performed. The results will be summarized in our following paper.

Aberration analysis and calculation in system of Gaussian beam illuminates lenslet array

Low order aberration was founded when focused Gaussian beam imaging at Kodak KAI -16000 image detector, which is integrated with lenslet array. Effect of focused Gaussian beam and numerical simulation calculation of the aberration were presented in this paper. First, we set up a model of optical imaging system based on previous experiment. Focused Gaussian beam passed through a pinhole and was received by Kodak KAI -16000 image detector whose microlenses of lenslet array were exactly focused on sensor surface. Then, we illustrated the characteristics of focused Gaussian beam and the effect of relative space position relations between waist of Gaussian beam and front spherical surface of microlenses to the aberration. Finally, we analyzed the main element of low order aberration and calculated the spherical aberration caused by lenslet array according to the results of above two steps. Our theoretical calculations shown that , the numerical simulation had a good agreement with the experimental result. Our research results proved that spherical aberration was the main element and made up about 93.44% of the 48 nm error, which was demonstrated in previous experiment. The spherical aberration is inversely proportional to the value of divergence distance between microlens and waist, and directly proportional to the value of the Gaussian beam waist radius.