Ting Cheong Ang
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Featured researches published by Ting Cheong Ang.
Process control and diagnostics. Conference | 2000
Ting Cheong Ang; Man Siu Tse; Sang Yee Loong; Yee Chong Wong; Wye Boon Loh
In this work, plasma induced damage resulting from high density plasma undoped silicate glass and fluorinated silicate glass (FSG) deposition processes was studied. The extent of the plasma damage due to the two HDP processes were characterized based on 0.18 micrometers transistor test structures with different antenna ratios. Our results show that the plasma-induced damage from HDP FSG is greater than that from HDP USG. We have developed a novel integration scheme that is effective in reducing the damage from HDP FSG down to levels comparable to that of USG.
Archive | 2000
Shyue Fong Quek; Ying Keung Leung; Sang Yee Loong; Ting Cheong Ang
Archive | 1999
Shyue Fong Quek; Ting Cheong Ang; Lap Chan; Sang Yee Loong
Archive | 1999
Lap Chan; Ting Cheong Ang; Shyue Pong Quek; Sang Yee Loong
Archive | 2001
Ting Cheong Ang; Shyue Fong Quek; Sang Yee Loong; Jun Song
Archive | 2000
Shyue Fong Quek; Ting Cheong Ang; Sang Yee Loong; Puay Ing Ong
Archive | 2000
Jun Song; Ting Cheong Ang; Shyue Fong Quek; Lap Chan
Archive | 1999
Jun Song; Shyue Fong Quek; Ting Cheong Ang; Lap Chan
Archive | 2001
Ting Cheong Ang; Sang Yee Loong; Shyue Fong Quek; Jun Song
Archive | 1999
Ting Cheong Ang; Shyue Pong Quek; Lap Chan; Sang Yee Loong
