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Todd Egan

Applied Materials

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Publication

Featured researches published by Todd Egan.

Archive | 2006

Integrated vacuum metrology for cluster tool

Damon Keith Cox; Todd Egan; Randhir Thakur; Arkadii V. Samoilov; Per-Ove Hansson

Archive | 2011

Damage isolation by shaped beam delivery in laser scribing process

James M. Holden; Nir Merry; Todd Egan

Archive | 2008

THREE DIMENSIONAL PACKAGING WITH WAFER-LEVEL BONDING AND CHIP-LEVEL REPAIR

Damon Keith Cox; Todd Egan; Michael X. Yang; Jeffrey C. Hudgens; Ingrid B. Peterson; Michael R. Rice

Archive | 2011

MULTI-LAYER MASK FOR SUBSTRATE DICING BY LASER AND PLASMA ETCH

James M. Holden; Wei-Sheng Lei; Brad Eaton; Todd Egan; Saravjeet Singh

Archive | 2008

Dual-mode robot systems and methods for electronic device manufacturing

Michael R. Rice; Jeffrey C. Hudgens; Todd Egan; Ingrid B. Peterson

Archive | 2013

ELECTROPLATING TOOL WITH FEEDBACK OF METAL THICKNESS DISTRIBUTION AND CORRECTION

Todd Egan; Edward W. Budiarto; Robert O. Miller; Abraham Ravid; Bridger Hoerner; Robert W. Batz; Daniel J. Woodruff

Archive | 2010

METHOD FOR IMAGING WORKPIECE SURFACES AT HIGH ROBOT TRANSFER SPEEDS WITH CORRECTION OF MOTION-INDUCED DISTORTION

Abraham Ravid; Todd Egan; Karen Lingel

Archive | 2012

Multi-layer mask for substrate dicing by laser by laser and plasma etch

James M. Holden; Wei-Sheng Lei; Brad Eaton; Todd Egan; Saravjeet Singh

Archive | 2015

MEASUREMENT OF FILM THICKNESS ON AN ARBITRARY SUBSTRATE

Edward W. Budiarto; Thomas Nowak; Todd Egan; Sergey Starik

Archive | 2013

METHOD AND APPARATUS FOR THE FORMATION OF SOLAR CELLS WITH SELECTIVE EMITTERS

Edward W. Budiarto; Todd Egan

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James M. Holden

Applied Materials

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Abraham Ravid

Applied Materials

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Brad Eaton

Applied Materials

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Edward W. Budiarto

Applied Materials

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Michael R. Rice

Applied Materials

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Wei-Sheng Lei

Applied Materials

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Saravjeet Singh

Applied Materials

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Jeffrey C. Hudgens

Applied Materials

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Ajay Kumar

Applied Materials

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Damon Keith Cox

Applied Materials

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