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James M. Holden

Applied Materials

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Publication

Featured researches published by James M. Holden.

Archive | 2011

Wafer dicing using femtosecond-based laser and plasma etch

Wei-Sheng Lei; Brad Eaton; Madhava Rao Yalamanchili; Saravjeet Singh; Ajay Kumar; James M. Holden

Archive | 2011

Multi-step and asymmetrically shaped laser beam scribing

Wei-Sheng Lei; Brad Eaton; Madhava Rao Yalamanchili; Saravjeet Singh; Ajay Kumar; James M. Holden

Archive | 2011

Damage isolation by shaped beam delivery in laser scribing process

James M. Holden; Nir Merry; Todd Egan

Archive | 2011

MULTI-LAYER MASK FOR SUBSTRATE DICING BY LASER AND PLASMA ETCH

James M. Holden; Wei-Sheng Lei; Brad Eaton; Todd Egan; Saravjeet Singh

Archive | 2010

INTEGRATED THIN FILM METROLOGY SYSTEM USED IN A SOLAR CELL PRODUCTION LINE

James M. Holden; Edward W. Budiarto; Karen Lingel

Archive | 2014

Approaches for cleaning a wafer during hybrid laser scribing and plasma etching wafer dicing processes

James M. Holden; Wei-Sheng Lei; James S. Papanu; Ajay Kumar

Archive | 2012

Multi-layer mask for substrate dicing by laser by laser and plasma etch

James M. Holden; Wei-Sheng Lei; Brad Eaton; Todd Egan; Saravjeet Singh

Archive | 2014

Pre-patterned dry laminate mask for wafer dicing processes

James M. Holden; Aparna Iyer; Brad Eaton; Ajay Kumar

Archive | 2013

METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING

James M. Holden; Song-Moon Suh; Todd Egan; Kalyanjit Ghosh; Leon Volfovski; Michael R. Rice; Richard Giljum

Archive | 2009

Spectrographic metrology of patterned wafers

James M. Holden; Edgar Genio; Todd Egan

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Brad Eaton

Applied Materials

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Todd Egan

Applied Materials

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Ajay Kumar

Applied Materials

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Saravjeet Singh

Applied Materials

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Wei-Sheng Lei

Applied Materials

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Madhava Rao Yalamanchili

Applied Materials

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Aparna Iyer

Applied Materials

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Edgar Genio

Applied Materials

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Edward W. Budiarto

Applied Materials

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James S. Papanu

Applied Materials

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