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Tohru Segawa

East Tennessee State University

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Publication

Featured researches published by Tohru Segawa.

Archive | 2001

Quartz glass jig for processing apparatus using plasma

Kyoichi Inaki; Naoto Watanabe; Tohru Segawa; Hiroyuki Kimura

Archive | 2003

Method for producing synthetic quartz glass and synthetic quartz glass article

Tatsuhiro Sato; Takahiro Kaitou; Akira Fujinoki; Toshiyuki Kato; Tohru Segawa; Nobumasa Yoshida

Archive | 1996

Method of producing cristobalite containing silica glass

Kyoichi Inaki; Tohru Segawa; Nobumasa Yoshida; Mamoru Endo

Archive | 2001

Plasma resistant quartz glass jig

Kyoichi Inaki; Naoki Hidaka-shi Hayashi; Tohru Segawa

Archive | 2003

Silica glass jig for semiconductor industry and method for producing the same

Tohru Segawa; Tatsuhiro Sato; Yoichiro Maruko; Kyoichi Inaki

Archive | 2001

Solution for treating surface of glass and treatment method

Yoichiro Maruko; Tohru Segawa; Tatsuhiro Sato

Archive | 2003

Production process of synthetic quartz glass

Tatsuhiro Sato; Takahiro Kaitou; Akira Fujinoki; Toshiyuki Kato; Tohru Segawa; Nobumasa Yoshida

Archive | 2001

Silica glass apparatus for semiconductor industry and method for producing the same

Kyoichi Inaki; Yoichiro Maruko; Tatsuhiro Sato; Tohru Segawa

Archive | 1996

Cristobalite-contained silica glass, method of producing same and silica glass jig made of same

Kyoichi Inaki; Tohru Segawa; Nobumasa Yoshida; Mamoru Endo

Archive | 2001

Quartz glass devices for the semiconductor industry and methods for their preparation

Kyoichi Tokorozawa-shi Inaki; Yoichiro Maruko; Tatsuhiro Sato; Tohru Segawa

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Collaboration

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Kyoichi Inaki

East Tennessee State University

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Tatsuhiro Sato

East Tennessee State University

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Nobumasa Yoshida

East Tennessee State University

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Mamoru Endo

East Tennessee State University

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Naoki Hidaka-shi Hayashi

East Tennessee State University

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Akira Fujinoki

East Tennessee State University

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Hiroyuki Kimura

East Tennessee State University

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Naoto Watanabe

East Tennessee State University

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Takahiro Kaitou

East Tennessee State University

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Toshiyuki Kato

East Tennessee State University

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