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Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta

East Tennessee State University

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Publication

Featured researches published by Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta.

Archive | 2001

Method for preparing silicon single crystal and silicon single crystal

Izumi Shin-Etsu Handotai Co. Ltd. Fusegawa; Ryoji Hoshi; Kouichi Shin-Etsu Handotai Co. Ltd Inokoshi; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta

Archive | 1999

Method of manufacturing semiconductor silicon single crystal wafer

Izumi Shin-Etsu Handotai Co. Ltd. Fusegawa; Toshirou Shin-Etsu Handotai Co. Ltd Hayashi; Ryoji Hoshi; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta

Archive | 2005

Method for manufacturing direct bond wafer, and direct bond wafer

Norihiro Shin-Etsu Handotai Co. Ltd. Kobayashi; Toru Ishizuka; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta; Hiroji Aga; Yasuo Nagaoka

Archive | 2000

Epitaxial silicon wafer and its production method, and substrate for epitaxial silicon wafer

Ryoji Hoshi; Susumu Shin-Etsu Handotai Co. Ltd Sonokawa; Masahiro Sakurada; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta; Izumi Shin-Etsu Handotai Co. Ltd. Fusegawa

Archive | 2005

Method for producing direct bonded wafer

Norihiro Shin-Etsu Handotai Co. Ltd. Kobayashi; Toru Ishizuka; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta; Hiroji Aga; Yasuo Nagaoka

Archive | 2003

Heater for manufacturing a crystal, crystal manufacturing apparatus and crystal manufacturing method.

Susumu Shin-Etsu Handotai Co. Ltd Sonokawa; Ryoji Hoshi; Wataru Shin-Etsu Handotai Co. Ltd. Sato; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta

Archive | 2003

Heater for crystal formation, apparatus for forming crystal and method for forming crystal

Susumu Shin-Etsu Handotai Co. Ltd Sonokawa; Ryoji Hoshi; Wataru Shin-Etsu Handotai Co. Ltd. Sato; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta

Archive | 2005

Verfahren zur herstellung eines direktgebondeten-wafers

Norihiro Shin-Etsu Handotai Co. Ltd. Kobayashi; Toru Ishizuka; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta; Hiroji Aga; Yasuo Nagaoka

Archive | 2005

Procédé de fabrication d'une tranche à collage direct

Norihiro Shin-Etsu Handotai Co. Ltd. Kobayashi; Toru Ishizuka; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta; Hiroji Aga; Yasuo Nagaoka

Archive | 2003

Dispositif de chauffage, appareil et procede permettant de former des cristaux

Ryoji Hoshi; Tomohiko Shin-Etsu Handotai Co. Ltd. Ohta; Wataru Shin-Etsu Handotai Co. Ltd. Sato; Susumu Shin-Etsu Handotai Co. Ltd Sonokawa

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Collaboration

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Ryoji Hoshi

East Tennessee State University

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Susumu Shin-Etsu Handotai Co. Ltd Sonokawa

East Tennessee State University

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Izumi Shin-Etsu Handotai Co. Ltd. Fusegawa

East Tennessee State University

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Hiroji Aga

East Tennessee State University

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Norihiro Shin-Etsu Handotai Co. Ltd. Kobayashi

East Tennessee State University

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Toru Ishizuka

East Tennessee State University

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Yasuo Nagaoka

East Tennessee State University

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Masahiro Sakurada

East Tennessee State University

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Koji Kitagawa

East Tennessee State University

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Kouichi Shin-Etsu Handotai Co. Ltd Inokoshi

East Tennessee State University

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