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Dive into the research topics where Hiroji Aga is active.

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Featured researches published by Hiroji Aga.


ieee soi 3d subthreshold microelectronics technology unified conference | 2014

SOI substrate solutions for recent advanced device applications

Nobuhiko Noto; O. Ishikawa; Hiroji Aga; Toru Ishizuka; Isao Yokokawa; Masatake Nakano

SOI substrate technology for recent advanced device applications is reviewed from a standpoint of a dedicated wafer supplier. A structure of Si thin film on sapphire (SOS) has been used for device development and manufacturing from 1970s. Currently a SOI substrate of Si/SiO2/Si structure is widely used for industrial applications.


Archive | 2009

Method for manufacturing bonded wafer

Norihiro Kobayashi; Hiroji Aga; Yasuo Nagaoka; Nobuhiko Noto


Archive | 1998

Method of fabricating an SOI wafer and SOI wafer fabricated thereby

Hiroji Aga; Kiyoshi Mitani; Yukio Inazuki


Archive | 2004

Method for manufacturing SOI wafer and SOI wafer

Isao Yokokawa; Hiroji Aga; Kiyotaka Takano; Kiyoshi Mitani


Archive | 1999

Method of recycling a delaminated wafer and a silicon wafer used for the recycling

Susumu Kuwahara; Kiyoshi Mitani; Hiroji Aga; Masae Wada


Archive | 2004

Method for producing SOI wafer and SOI wafer

Hiroji Aga; Naota Tate; Susumu Kuwabara; Kiyoshi Mitani


Archive | 2009

Method for producing bonded wafer

Satoshi Oka; Hiroji Aga; Masahiro Kato; Nobuhiko Noto


Archive | 2002

Method of fabricating SOI wafer

Hiroji Aga; Kiyoshi Mitani


Archive | 2003

Method of producing soi wafer and soi wafer

Hiroji Aga; Isao Yokokawa; Kiyotaka Takano; Kiyoshi Mitani


Archive | 1999

Method of fabricating an SOI wafer by hydrogen ion delamination without independent bonding heat treatment

Yukio Inazuki; Hiroji Aga; Norihiro Kobayashi; Kiyoshi Mitani

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Kiyoshi Mitani

East Tennessee State University

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Norihiro Kobayashi

East Tennessee State University

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Toru Ishizuka

East Tennessee State University

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Isao Yokokawa

East Tennessee State University

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Nobuhiko Noto

East Tennessee State University

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Yasuo Nagaoka

East Tennessee State University

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Hiroshi Takeno

East Tennessee State University

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Masahiro Kato

Mitsubishi Heavy Industries

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