Torsten Antrack

Probe element for coordinate measurement systems

Optical near-field microscope

Illumination device for microscope; has probe of scanning microscope in bore through lens system

Instrument for determining the topography of a surface

Determining image errors by computing test object Zernike coefficients involves detecting pupil edge according to position, size in computer system in addition to wavefront measurement by evaluating light from object recorded by CCD camera

Scanning probe microscope with probe integrated in an optical system

Beam splitter device for microscope, has beam splitter plate arranged in area of beam intersection point and comprising reflecting area with reflectance above specific percentages and area with transmittance above specific percentages

Verfahren zum Herstellen einer Nahfeldsonde für die optische Nahfeldmikroskopie

Optical near-field probe for scanning near field microscopy

Mikroskop für die optische Nahfeldmikroskopie Microscope for optical near-field microscopy