Jörn Greif-Wüstenbecker

Abbildungssystem zur Emulation hochaperturiger Scannersysteme

Microscope for investigation of masks with different thickness, has illumination device, which has light source, and has illumination optical system that illuminates mask to be examined with illuminating radiation

Polarizer device for illumination system, has interference device converting light beam with angular distribution to another beam, and decoupling device receiving latter beam and emitting beam with another angular distribution

Anordnung zur homogenen Beleuchtung eines Feldes

Microscopic imaging system and procedure for the emulation of a high aperture imaging system, in particular for mask inspection

Optical device for homogenization of laser radiation, has homogenizing module, which divides laser radiation in incoherent partial radiation lateral to each other

Diffractive element for the polarization separation of nonpolarized electromagnetic radiation in the uv region, and method for producing a diffractive element of this type

Verfahren zur Korrektur der Apodisierung in mikroskopischen Abbildungssystemen

Object illuminating arrangement for e.g. microscope, has light beam bundling lenses projecting far field of light bundles leaving from diffractive diffusers in two levels of microscope, where levels correspond to field level or pupil level

Field illumination device for micro-lithography projection exposure system, has field homogenization unit and lens provided between laser and reflecting unit, which is designed so that position of optical axis is not changed by rotation