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Toshiaki Ohmori

Mitsubishi

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Publication

Featured researches published by Toshiaki Ohmori.

Archive | 1997

Washing apparatus, and washing method

Itaru Kanno; Toshiaki Ohmori; Hiroshi Tanaka; Nobuaki Doi

Archive | 1990

Processing apparatus for semiconductor wafers

Masuo Tada; Takeki Hata; Takaaki Fukumoto; Toshiaki Ohmori

Archive | 1990

Processing method for semiconductor wafers

Masuo Tada; Takeki Hata; Takaaki Fukumoto; Toshiaki Ohmori

Archive | 1989

Ice particle forming and blasting device

Masuo Tada; Takaaki Fukumoto; Toshiaki Ohmori

Archive | 1990

Method of cleaning a surface by blasting the fine frozen particles against the surface

Toshiaki Ohmori; Itaru Kanno; Takaaki Fukumoto

Archive | 1992

Apparatus for treating the surface of a semiconductor substrate

Cozy Ban; Toshiaki Ohmori; Takaaki Fukumoto

Archive | 1990

Method of treating surface of substrate with ice particles and hydrogen peroxide

Shinji Endo; Toshiaki Ohmori; Takaaki Fukumoto; Keisuke Namba

Archive | 1991

Cleaning device using fine frozen particles

Itaru Kanno; Takaaki Fukumoto; Toshiaki Ohmori

Archive | 1989

Carrier cleaning and drying apparatus

Yasuo Kamimura; Toshiaki Ohmori; Motonori Yanagi; Takaaki Fukumoto; Masaharu Hama

Archive | 1988

Method and apparatus for vapor drying

Toshiaki Ohmori; Masaharu Hama; Takaaki Fukumoto

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Takaaki Fukumoto

Mitsubishi

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Itaru Kanno

Mitsubishi

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Masuo Tada

Mitsubishi

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Masaharu Hama

Mitsubishi

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Takeki Hata

Mitsubishi

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Hiroshi Tanaka

Mitsubishi

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Nobuaki Doi

Mitsubishi

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Motonori Yanagi

Mitsubishi

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Yasuo Kamimura

Mitsubishi

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Akemi Nagae

Mitsubishi

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