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Itaru Kanno

Mitsubishi

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Publication

Featured researches published by Itaru Kanno.

Archive | 1997

Washing apparatus, and washing method

Itaru Kanno; Toshiaki Ohmori; Hiroshi Tanaka; Nobuaki Doi

Archive | 1990

Method of cleaning a surface by blasting the fine frozen particles against the surface

Toshiaki Ohmori; Itaru Kanno; Takaaki Fukumoto

Archive | 1997

Two-fluid cleaning jet nozzle and cleaning apparatus, and method utilizing the same

Itaru Kanno; Masuo Tada; Mitsuhiro Ogawa

Archive | 1999

Wafer cleaning apparatus

Itaru Kanno

Archive | 1990

Apparatus for polishing an article with frozen particles

Akiko Hisasue; Itaru Kanno; Takaaki Fukumoto

Archive | 1991

Cleaning device using fine frozen particles

Itaru Kanno; Takaaki Fukumoto; Toshiaki Ohmori

Archive | 1992

Device for and method of producing hyperfine frozen particles

Cozy Ban; Itaru Kanno; Takaaki Fukumoto

Archive | 1999

Resist residue removal apparatus and method

Seiji Muranaka; Itaru Kanno

Archive | 1996

Washing apparatus and method therefor

Takeshi Kuroda; Itaru Kanno

Archive | 1991

Cleaning device for semiconductor wafers

Itaru Kanno; Nobuyoshi Hattori; Takaaki Fukumoto; Masuo Tada

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Collaboration

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Takaaki Fukumoto

Mitsubishi

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Toshiaki Ohmori

Mitsubishi

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Masuo Tada

Mitsubishi

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Mitsuhiro Ogawa

Mitsubishi

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Hiroshi Tanaka

Mitsubishi

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Nobuaki Doi

Mitsubishi

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Akiko Hisasue

Mitsubishi

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Cozy Ban

Mitsubishi

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Naoki Yokoi

Mitsubishi

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Nobuyoshi Hattori

Mitsubishi Electric

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