Itaru Kanno

Washing apparatus, and washing method

Method of cleaning a surface by blasting the fine frozen particles against the surface

Two-fluid cleaning jet nozzle and cleaning apparatus, and method utilizing the same

Wafer cleaning apparatus

Apparatus for polishing an article with frozen particles

Cleaning device using fine frozen particles

Device for and method of producing hyperfine frozen particles

Resist residue removal apparatus and method

Washing apparatus and method therefor

Cleaning device for semiconductor wafers