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Toshihiro Tsuchiya

East Tennessee State University

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Publication

Featured researches published by Toshihiro Tsuchiya.

Archive | 1996

Process of polishing wafers

Toshihiro Tsuchiya; Kouichi Tanaka; Kiromasa Hashimoto; Kouji Morita; Tsutomu Takaku

Archive | 2003

Wafer polishing device, its polishing head, and wafer polishing method

Hiromasa Hashimoto; Toshimasa Kubota; Takahiro Matsuda; Toshihiro Tsuchiya; Junichi Ueno; 淳一 上野; 俊昌 久保田; 敏弘 土屋; 隆宏 松田; 浩 橋本

Archive | 1996

Method of producing slices

Fumihiko Hasegawa; Hitoshi Misaka; Toshihiro Tsuchiya

Archive | 1996

Process of polishing silicon wafers

Toshihiro Tsuchiya; Kouichi Tanaka; Hiromasa Hashimoto; Kouji Morita; Tsutomu Takaku

Archive | 1997

Method for polishing thin plate and apparatus for polishing

Koichi Tanaka; Toshihiro Tsuchiya; Koji Morita; Tsutomu Takaku

Archive | 1997

Apparatus for polishing peripheral portion of wafer

Fumihiko Hasegawa; Yasuyoshi Kuroda; Toshihiro Tsuchiya; Koichiro Ichikawa; Yasuo Inada

Archive | 1998

Polishing body composed of wafer polishing cloth or polishing surface plate and wafer polishing method using same

Toshihiro Tsuchiya; 敏弘 土屋

Archive | 1994

WIRE SAW AND MANUFACTURE OF WIRE

Fumihiko Hasegawa; Kohei Toyama; Toshihiro Tsuchiya; 敏弘 土屋; 公平 外山; 文彦 長谷川

Archive | 1996

Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat

Fumihiko Hasegawa; Yasuyoshi Kuroka; Toshihiro Tsuchiya; Koichiro Ichikawa; Yasuo Inada

Archive | 2003

Wafer polishing method and apparatus

Toshihiro Tsuchiya

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Fumihiko Hasegawa

East Tennessee State University

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Koichiro Ichikawa

East Tennessee State University

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Yasuo Inada

East Tennessee State University

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Yasuyoshi Kuroda

East Tennessee State University

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Tsutomu Takaku

East Tennessee State University

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Koichi Tanaka

East Tennessee State University

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Koji Morita

East Tennessee State University

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Hiromasa Hashimoto

East Tennessee State University

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Kouichi Tanaka

East Tennessee State University

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Kouji Morita

East Tennessee State University

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