Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Toshimitsu Miyata is active.

Publication


Featured researches published by Toshimitsu Miyata.


Archive | 2006

Substrate treating device, heating device used therefor, and method of manufacturing semiconductor utilizing the devices

Toshimitsu Miyata; Akira Hayashida; Masakazu Shimada; Kimio Kitamura; Kenji Tanaka


Archive | 2002

Substrate processing apparatus and a method for fabricating a semiconductor device by using same

Tetsuo Yamamoto; Makoto Ozawa; Shuji Yonemitsu; Toshimitsu Miyata


Archive | 2004

Semiconductor producing device and semiconductor producing method

Katsuhisa Kasanami; Toshimitsu Miyata; Mitsunori Ishisaka


Archive | 1999

Vertical furnace and wafer boat for vertical furnace

Masaki Tsuruki; Takashi Machida; Toshimitsu Miyata


Archive | 2001

Method and apparatus for use in manufacturing a semiconductor device

Tetsuya Wada; Toshimitsu Miyata; Eisuke Nishitani


Archive | 2006

Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure

Toshimitsu Miyata; Akira Hayashida; Masakazu Shimada; Kimio Kitamura; Kenji Tanaka


Archive | 2002

Substrate processing apparatus and method for manufacturing a semiconductor device employing same

Yukinori Aburatani; Toshimitsu Miyata


Archive | 2001

Device for producing semiconductor

Kenji Ishikawa; Katsunao Kasatsugu; Toshimitsu Miyata; Takeji Ota; Wakako Shiratori; 岳児 太田; 敏光 宮田; 和賀子 白鳥; 顕治 石川; 克尚 笠次


Archive | 2000

MANUFACTURING APPARATUS FOR SEMICONDUCTOR, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Satoshi Kakizaki; Katsunao Kasatsugu; Toshimitsu Miyata; Nobuhito Shima; Shinichi Shimada; 敏光 宮田; 真一 島田; 信人 嶋; 智 柿崎; 克尚 笠次


Archive | 1998

Cassette transfer system

Shigeo Fukuda; Takeshi Ito; Tetsuya Kosugi; Toshimitsu Miyata; Tsutomu Takeuchi; Seiji Watanabe; Tetsuo Yamamoto; 伊藤 剛; 敏光 宮田; 哲也 小杉; 哲夫 山本; 努 武内; 誠治 渡辺; 重夫 福田

Collaboration


Dive into the Toshimitsu Miyata's collaboration.

Researchain Logo
Decentralizing Knowledge