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Toshimitsu Miyata

Hitachi

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Publication

Featured researches published by Toshimitsu Miyata.

Archive | 2006

Substrate treating device, heating device used therefor, and method of manufacturing semiconductor utilizing the devices

Toshimitsu Miyata; Akira Hayashida; Masakazu Shimada; Kimio Kitamura; Kenji Tanaka

Archive | 2002

Substrate processing apparatus and a method for fabricating a semiconductor device by using same

Tetsuo Yamamoto; Makoto Ozawa; Shuji Yonemitsu; Toshimitsu Miyata

Archive | 2004

Semiconductor producing device and semiconductor producing method

Katsuhisa Kasanami; Toshimitsu Miyata; Mitsunori Ishisaka

Archive | 1999

Vertical furnace and wafer boat for vertical furnace

Masaki Tsuruki; Takashi Machida; Toshimitsu Miyata

Archive | 2001

Method and apparatus for use in manufacturing a semiconductor device

Tetsuya Wada; Toshimitsu Miyata; Eisuke Nishitani

Archive | 2006

Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure

Toshimitsu Miyata; Akira Hayashida; Masakazu Shimada; Kimio Kitamura; Kenji Tanaka

Archive | 2002

Substrate processing apparatus and method for manufacturing a semiconductor device employing same

Yukinori Aburatani; Toshimitsu Miyata

Archive | 2001

Device for producing semiconductor

Kenji Ishikawa; Katsunao Kasatsugu; Toshimitsu Miyata; Takeji Ota; Wakako Shiratori; 岳児 太田; 敏光 宮田; 和賀子 白鳥; 顕治 石川; 克尚 笠次

Archive | 2000

MANUFACTURING APPARATUS FOR SEMICONDUCTOR, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Satoshi Kakizaki; Katsunao Kasatsugu; Toshimitsu Miyata; Nobuhito Shima; Shinichi Shimada; 敏光 宮田; 真一 島田; 信人 嶋; 智 柿崎; 克尚 笠次

Archive | 1998

Cassette transfer system

Shigeo Fukuda; Takeshi Ito; Tetsuya Kosugi; Toshimitsu Miyata; Tsutomu Takeuchi; Seiji Watanabe; Tetsuo Yamamoto; 伊藤 剛; 敏光 宮田; 哲也 小杉; 哲夫 山本; 努 武内; 誠治 渡辺; 重夫 福田

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Mitsunori Ishisaka

Hitachi

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Akira Hayashida

Hitachi

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Kenji Tanaka

Hitachi

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Kimio Kitamura

Hitachi

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Masakazu Shimada

Hitachi

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Katsuhisa Kasanami

Hitachi

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Akihiro Sato

Hitachi

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Eisuke Nishitani

Hitachi

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Jyunichi Nishihara

Hitachi

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Koji Shibata

Hitachi

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