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Akira Hayashida

Hitachi

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Publication

Featured researches published by Akira Hayashida.

Archive | 2017

Substrate processing apparatus and substrate processing method

Masaaki Ueno; Masakazu Shimada; Takeo Hanashima; Haruo Morikawa; Akira Hayashida

Archive | 2008

SEMICONDUCTOR MANUFACTURING APPARATUS AND SUBSTRATE PROCESSING METHOD

Masashi Sugishita; Masaaki Ueno; Akira Hayashida

Archive | 2006

Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method

Masaaki Ueno; Akira Hayashida; Masakazu Shimada; Takenori Oka

Archive | 2008

Substrate processing method and semiconductor manufacturing apparatus

Masashi Sugishita; Masaaki Ueno; Akira Hayashida

Archive | 2006

Substrate treating device, heating device used therefor, and method of manufacturing semiconductor utilizing the devices

Toshimitsu Miyata; Akira Hayashida; Masakazu Shimada; Kimio Kitamura; Kenji Tanaka

Archive | 2009

Substrate processing method and film forming method

Masaaki Ueno; Masakazu Shimada; Takeo Hanashima; Haruo Morikawa; Akira Hayashida

Archive | 2006

Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure

Toshimitsu Miyata; Akira Hayashida; Masakazu Shimada; Kimio Kitamura; Kenji Tanaka

Archive | 2011

Heat treatment apparatus and method of manufacturing semiconductor device

Keishin Yamazaki; Akira Hayashida; Masaaki Ueno; Manabu Izumi; Katsuaki Nogami

Archive | 2007

Substrate processing apparatus, method of manufacturing semiconductor device, and heating apparatus

Akira Hayashida; Masaaki Ueno; Masakazu Shimada; Yukinori Aburatani; Tomoyuki Yamada; Sieyo Nakashima; Masashi Sugishita

Archive | 2008

Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices

Akira Hayashida; Masaaki Ueno; Masakazu Shimada; Masashi Sugishita; Toshimitsu Miyata; Kimio Kitamura; Kenji Tanaka; Jyunichi Nishihara

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Collaboration

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Masaaki Ueno

Hitachi

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Masakazu Shimada

Hitachi

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Masashi Sugishita

Hitachi

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Kenji Tanaka

Hitachi

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Kimio Kitamura

Hitachi

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Toshimitsu Miyata

Hitachi

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Haruo Morikawa

Hitachi

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Jyunichi Nishihara

Hitachi

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Takeo Hanashima

Hitachi

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Tomoyuki Yamada

Hitachi

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