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Toshiyuki Tsuchiya

Denso

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Publication

Featured researches published by Toshiyuki Tsuchiya.

The proceedings of the JSME annual meeting | 2008

312 Electrical Equivalent Circuit Model of Microfluidic System Containing Piezoelectric Valveless Micropump and Viscoelastic PDMS Microchannel

Akihiro Nakata; Shinji Tanaka; Koji Sugano; Toshiyuki Tsuchiya; Osamu Tabata

Archive | 2013

Gyro sensor and composite sensor comprising gyro sensor

Tomoya Jomori; Toshiyuki Tsuchiya

The Proceedings of the Dynamics & Design Conference | 2016

Thermomechanical noise evaluation of capacitive MEMS accelerometer array with sub-micrometer gap

Toshiyuki Tsuchiya; Yuki Matsui; Yoshikazu Hirai; Oasmu Tabata

The Proceedings of Mechanical Engineering Congress, Japan | 2016

Tensile testing of Si microstructures fully coated with submicrometer-thick DLC film deposited using PECVD

Wenlei Zhang; Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

The Proceedings of Mechanical Engineering Congress, Japan | 2016

Development of 3D Simulator for Single-Step Negative Tone Thick Film Projection Photolithography

Katsuo Nakamura; Florian Larramendy; Yoshikazu Hirai; Toshiyuki Tsuchiya; Oliver Paul; Osamu Tabata

The Proceedings of Mechanical Engineering Congress, Japan | 2016

Design Optimization for Parallel Plate Capacitive Sensor with Sub-Micrometer Gap for Preventing Pull-In

Toshiyuki Tsuchiya; Yuki Matsui; Yoshikazu Hirai; Osamu Tabata

The Proceedings of the Symposium on Micro-Nano Science and Technology | 2015

29pm3-PN-49 Tensile Fracture Behaviors of (110) Silicon Microstructures at High Temperature

Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

The Proceedings of the Symposium on Micro-Nano Science and Technology | 2015

29pm1-F-2 Integration of Silicon Nanowire to SOI-MEMS and Diameter Control Using Thermal Oxidation

Tetsuya Hemmi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

The Proceedings of the Materials and Mechanics Conference | 2015

OS1418-467 Dynamic stress measurement of single crystal silicon microstructures using micro Raman spectroscopy

Toshiyuki Tsuchiya; Yusuke Kogita; Yoshikazu Hirai; Osamu Tabata

The Proceedings of Mechanical Engineering Congress, Japan | 2015

J2210404 Tensile-Mode Fatigue Testing of Silicon Micro Structure with Integrated Strain Gauge

Akio Uesugi; Yoshikazu Hirai; Toshiyuki Tsuchiya; Osamu Tabata

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Collaboration

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Osamu Tabata

Kyoto University

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Yoshikazu Hirai

Kyoto University

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Koji Sugano

Kobe University

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Akio Uesugi

Kyoto University

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Tsuyoshi Ikehara

National Institute of Advanced Industrial Science and Technology

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Tomoki Tanemura

Kyoto University

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Junya Suzuki

Kyoto University

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Akira Umeda

National Institute of Advanced Industrial Science and Technology

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Atsushi Nakano

Tenri Hospital

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Kenji Miyamoto

Kyoto University

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