Troy B. Scoggins
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Publication
Featured researches published by Troy B. Scoggins.
advanced semiconductor manufacturing conference | 2005
Dan Alvarez; Joseph Rotter; Troy B. Scoggins
A method was developed to measure hydrocarbons to 1 part-per-trillion (ppt) concentration levels with a gas chromatograph and flame ionization detector (GC/FID).1 This method was used to measure purifier siloxane removal efficiencies from air under dry and humid conditions. Several media types were examined: activated alumina (AA), activated carbon (AC), bead-shaped activated carbon (BAC), a proprietary inorganic material (PIM) and a zeolite (ZEO). Under dry conditions, all five materials removed the siloxane challenge to below 1 ppt. The AC material had a removal efficiency of 286 ppt under humid conditions. The AA, BAC, PIM and ZEO removed the siloxane challenge to below 1 ppt under humid conditions. After media saturation was reached, the materials were regenerated and siloxane removal efficiencies were reexamined. Under humid conditions only the AA, PIM and ZEO materials were regenerable to below 1 ppt efficiency levels
Archive | 2006
Daniel Alvarez; Troy B. Scoggins; Russell J. Holmes
Archive | 2007
Oleg P. Kishkovich; Xavier Gabarre; William M. Goodwin; James Lo; Troy B. Scoggins
Archive | 2005
Daniel Alvarez; Troy B. Scoggins; Tram Doan Nguyen; Yasushi Ohyashiki
Archive | 2004
Daniel Alvarez; Jeffrey J. Spiegelman; Joshua T. Cook; Tram Doan Nguyen; Daniel A. Lev; Troy B. Scoggins
Archive | 2005
Troy B. Scoggins
Archive | 2007
Oleg P. Kishkovich; Xavier Gabarre; William M. Goodwin; James Lo; Troy B. Scoggins
Archive | 2007
Oleg P. Kishkovich; Xavier Gabarre; William M. Goodwin; James Lo; Troy B. Scoggins
Archive | 2006
Daniel Alvarez; Troy B. Scoggins; Jeffrey J. Spiegelman
Archive | 2006
Daniel Alvarez; Troy B. Scoggins; Russell J. Holmes
