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Tsukasa Matsuda

Tokyo Electron

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Publication

Featured researches published by Tsukasa Matsuda.

Archive | 2005

Plasma enhanced atomic layer deposition system and method

Jacques Faguet; Frank M. Cerio; Tsukasa Matsuda; Kaoru Yamamoto

Archive | 2007

Particle-measuring system and particle-measuring method

Hayashi Otsuki; Tsukasa Matsuda; Kyoko Ikeda

Archive | 2005

Method for forming a ruthenium metal layer on a patterned substrate

Tsukasa Matsuda

Archive | 2007

Method of integrating peald ta-containing films into cu metallization

Tadahiro Ishizaka; Tsukasa Matsuda; Masamichi Hara; Jacques Faguet; Yasushi Mizusawa

Archive | 2006

Method of integrated substrated processing using a hot filament hydrogen radical souce

Tsukasa Matsuda; Isamu Sakuragi

Archive | 2006

Processing system containing a hot filament hydrogen radical source for integrated substrate processing

Tsukasa Matsuda; Isamu Sakuragi

Archive | 2007

Film Forming Method, Plasma Film Forming Apparatus and Storage Medium

Takashi Sakuma; Taro Ikeda; Osamu Yokoyama; Tsukasa Matsuda; Tatsuo Hatano; Yasushi Mizusawa

Archive | 2003

Method for cleaning substrate processing chamber

Hideaki Yamasaki; Kazuhito Nakamura; Koumei Matsuzawa; Tsukasa Matsuda; Yumiko Kawano

Archive | 2003

CVD process capable of reducing incubation time

Hideaki Yamasaki; Tatsuo Hatano; Tsukasa Matsuda; Taro Ikeda; Kazuhito Nakamura; Koumei Matsuzawa; Yumiko Kawano; Mitsuhiro Tachibana

Archive | 2000

Apparatus and method for measuring particle

Kyoko Ikeda; Tsukasa Matsuda; Hayashi Otsuki; 林 大槻; 司 松田; 恭子 池田

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Collaboration

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Hayashi Otsuki

Tokyo Electron

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Isamu Sakuragi

Tokyo Electron

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Kyoko Ikeda

Tokyo Electron

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Frank M. Cerio

Tokyo Electron

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Hideaki Yamasaki

Tokyo Electron

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Jacques Faguet

Tokyo Electron

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Kaoru Yamamoto

Tokyo Electron

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Kazuhito Nakamura

Tokyo Electron

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Koumei Matsuzawa

Tokyo Electron

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Tadahiro Ishizaka

Tokyo Electron

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