Is this you? Create Your Porfile
Avatar

Hayashi Otsuki

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Hayashi Otsuki is active.

Explore More

Publication

Featured researches published by Hayashi Otsuki.

Archive | 2007

Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film

Hayashi Otsuki

Archive | 2002

Method of forming a barrier film and method of forming wiring structure and electrodes of semiconductor device having a barrier film

Kimihiro Matsuse; Hayashi Otsuki

Archive | 2005

Method of forming a metal film for electrode

Kimihiro Matsuse; Hayashi Otsuki

Archive | 2007

Particle-measuring system and particle-measuring method

Hayashi Otsuki; Tsukasa Matsuda; Kyoko Ikeda

Archive | 2005

Method of forming titanium film by CVD

Kunihiro Tada; Hayashi Otsuki

Archive | 1998

WIRING STRUCTURE OF SEMICONDUCTOR DEVICE, ELECTRODE, AND METHOD FOR FORMING THEM

Kimihiro Matsuse; Hayashi Otsuki

Archive | 1998

Method of forming semiconductor wiring structures

Kimihiro Matsuse; Hayashi Otsuki

Archive | 2004

TiSiN film forming method, diffusion barrier TiSiN film, semiconductor device, method of fabricating the same and TiSiN film forming system

Hayashi Otsuki; Kunihiro Tada; Kimihiro Matsuse

Archive | 2000

SiC material, semiconductor processing equipment and method of preparing SiC material therefor

Hayashi Otsuki; Satoru Nogami

Archive | 1999

Method for forming TiSiN film, diffusion preventive film comprising TiSiN film, semiconductor device and its production method, and apparatus for forming TiSiN film

Hayashi Otsuki; Kunihiro Tada; Kimihiro Matsuse

Explore More

Collaboration

Dive into the Hayashi Otsuki's collaboration.

Top Co-Authors
Avatar

Kimihiro Matsuse

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kunihiro Tada

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kyoko Ikeda

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Satoru Nogami

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Tsukasa Matsuda

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

恭子 池田

Kyushu University

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge