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Dive into the research topics where Tsutomu Nakada is active.

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Featured researches published by Tsutomu Nakada.


ieee electron devices technology and manufacturing conference | 2017

Asimple test method forelectromigration reliability ofsolder/Cu pillar bumpsusing flat cables

Naoki Azuma; Misaki Owada; Takumi Abe; Tsutomu Nakada; Makoto Kubota; Kazuyoshi Ueno

To evaluate electromigration (EM) reliability of solder/copper (Cu) pillar bumps, a simple and lowcost test method using a flat cable has been developed. The EM lifetime of the pillar bumps with differently plated structures or different plating chemicals were compared. The results show the different lifetime distributions depending on the different structures or plating chemicals. From the results, the developed test method is considered to be effective for evaluating the EM reliability in a process development such as optimization of plating chemicals.


Archive | 2000

Apparatus and method for processing substrate

Kuniaki Horie; Yukio Fukunaga; Naoaki Ogure; Tsutomu Nakada; Masahito Abe; Mitsunao Shibasaki; Hidenao Suzuki; Yuji Araki; Kiwamu Tsukamoto


Archive | 1997

Vaporizer apparatus and film deposition apparatus therewith

Kuniaki Horie; Hidenao Suzuki; Tsutomu Nakada; Fumio Kuriyama; Takeshi Murakami; Masahito Abe; Yuji Araki


Archive | 1998

Vapor-phase film growth apparatus and gas ejection head

Kuniaki Horie; Tsutomu Nakada; Takeshi Murakami; Hidenao Suzuki; Masahito Abe; Yuji Araki


Archive | 2000

Liquid feed vaporization system and gas injection device

Kuniaki Horie; Hidenao Suzuki; Tsutomu Nakada; Fumio Kuriyama; Takeshi Murakami; Masahito Abe; Yuji Araki; Hiroyuki Ueyama


Archive | 2004

Copper plating bath and plating method

Tsutomu Nakada; Tsuyoshi Sahoda; Koji Mishima; Ryoichi Kimizuka; Takeshi Kobayashi


Archive | 2004

Plating method and plating solution

Tsuyoshi Sahoda; Tsutomu Nakada; Koji Mishima; Ryoichi Kimizuka


Archive | 2007

Electroplating apparatus and electroplating method

Satoru Yamamoto; Keiichi Kurashina; Takashi Kawakami; Tsutomu Nakada; Hiroyuki Kanda; Junji Kunisawa; Kunihito Ide


Archive | 1998

Vapor feed supply system

Kuniaki Horie; Hidenao Suzuki; Tsutomu Nakada; Takeshi Murakami; Yukio Fukunaga; Masahito Abe; Hiroyuki Shinozaki; Kiwamu Tsukamoto; Mitsunao Shibasaki; Yuji Araki; Hiroyuki Ueyama


Archive | 2004

Plating apparatus, plating method and substrate processing apparatus

Tsutomu Nakada; Junji Kunisawa; Hiroyuki Kanda; Mizuki Nagai; Satoru Yamamoto; Koji Mishima; Shinya Morisawa; Seiji Katsuoka; Natsuki Makino; Yukio Fukunaga

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