Yukio Fukunaga | Researchain

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Featured researches published by Yukio Fukunaga.

Archive | 2000

Apparatus and method for processing substrate

Kuniaki Horie; Yukio Fukunaga; Naoaki Ogure; Tsutomu Nakada; Masahito Abe; Mitsunao Shibasaki; Hidenao Suzuki; Yuji Araki; Kiwamu Tsukamoto

Archive | 1997

Reactant gas ejector head

Yukio Fukunaga; Hiroyuki Shinozaki; Kiwamu Tsukamoto; Masao Saitoh

Archive | 1996

Reactant gas ejector head and thin-film vapor deposition apparatus

Takeshi Murakami; Noriyuki Takeuchi; Hiroyuki Shinozaki; Kiwamu Tsukamoto; Yukio Fukunaga; Akihisa Hongo

Archive | 2000

Positive displacement type liquid-delivery apparatus

Kuniaki Horie; Yukio Fukunaga; Akihisa Hongo; Kiwamu Tsukamoto; Kenji Kamoda; Shinya Uemura

Archive | 1997

Liquid material vaporizer apparatus and gas ejection device

Yukio Fukunaga; Takeshi Murakami; Naoaki Ogure; Akihisa Hongo

Archive | 2004

Interconnects forming method and interconnects forming apparatus

Xinming Wang; Daisuke Takagi; Akihiko Tashiro; Yukio Fukunaga; Akira Fukunaga

Archive | 2004

Apparatus and method for forming interconnects

Hiroaki Inoue; Yukio Fukunaga; Akira Susaki

Archive | 1998

Vapor feed supply system

Kuniaki Horie; Hidenao Suzuki; Tsutomu Nakada; Takeshi Murakami; Yukio Fukunaga; Masahito Abe; Hiroyuki Shinozaki; Kiwamu Tsukamoto; Mitsunao Shibasaki; Yuji Araki; Hiroyuki Ueyama

Archive | 2004

Plating apparatus, plating method and substrate processing apparatus

Tsutomu Nakada; Junji Kunisawa; Hiroyuki Kanda; Mizuki Nagai; Satoru Yamamoto; Koji Mishima; Shinya Morisawa; Seiji Katsuoka; Natsuki Makino; Yukio Fukunaga

Archive | 2005