Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Tzu-Chun Yen is active.

Publication


Featured researches published by Tzu-Chun Yen.


International Scholarly Research Notices | 2014

Effect of Growth Temperature on Structural Quality of In-Rich Alloys on Si (111) Substrate by RF-MOMBE

Wei-Chun Chen; Yue-Han Wu; Jr.-Sheng Tian; Tzu-Chun Yen; Pei-Yin Lin; J. F. Chen; Chien-Nan Hsiao; Li Chang

In-rich InAlN films were grown directly on Si (111) substrate by RF-MOMBE without any buffer layer. InAlN films were grown at various substrate temperatures in the range of 460–540°C with TMIn/TMAl ~3.3. Structural properties of InAlN ternary alloys were investigated with X-ray diffraction, scanning electron microscopy, and transmission electron microscopy (TEM). It is shown that the deposited In0.8AlM0.2N (0001) films can be in epitaxy with Si (111) substrate with orientation relationship of //. Also, the growth rate around ~0.25 μm/h almost remains constant for growth in the temperature range from 460 to 520°C. Cross-sectional TEM from InAlN grown on Si (111) at 460°C shows that the epitaxial film is in direct contact with Si without any interlayer.


Journal of Vacuum Science and Technology | 2013

Stability and etching of titanium oxynitride films in hydrogen microwave plasma

Hien Do; Tzu-Chun Yen; Li Chang

Epitaxial titanium oxynitride (TiNO) films deposited on MgO by pulsed laser deposition were treated in hydrogen microwave plasma. Scanning electron microscopy and x-ray photoelectron spectroscopy were used to examine the stability and etching of TiNO which strongly depended on hydrogen gas pressure. TiNO was very chemically stable and remained with good crystallinity under hydrogen pressure below 5300 Pa. With increase of pressure, it may lead to the formation of etch pits in inverse pyramid shape. The etch mechanism as well as the effects of gas pressure and etching time are also presented.


china semiconductor technology international conference | 2016

Post sulfurization effect on the MoS2 grown by pulsed laser deposition

Yen-Teng Ho; Tzu-Chun Yen; Tien-Tung Luong; Lin-Lung Wei; Yung-Yi Tu; Yung-Ching Chu; Hung-Ru Hsu; Edward Yi Chang

Two inches size with high quality layered growth of MoS<sub>2</sub> was achieved by PLD on c-plane sapphire substrate. 2~3 monolayer MoS<sub>2</sub> was obtained within 2 inches wafer estimated from Raman analysis and confirmed by cross-sectional view of TEM. Additionally, the oxide states of Mo 3d core level spectra of MoS<sub>2</sub>, analyzed by XPS, can be effectively reduced by adopting a post sulfurization process in H<sub>2</sub>S. The post process also improve the photoluminescence (PL) of MoS<sub>2</sub> as well as the electrical characteristic of MoS<sub>2</sub> FET due to elimination the Mo oxide in the grown film.


Journal of Vacuum Science and Technology | 2014

Defects in nonpolar (13(4)over-bar0) ZnO epitaxial film grown on (114) LaAlO3 substrate

Tzu-Chun Yen; Wei-Lin Wang; Chun-Yen Peng; Jr-Sheng Tian; Yen-Teng Ho; Li Chang

The defects in (134¯0)ZnO epitaxial film grown on (114)LaAlO3 (LAO) have been systematically investigated by using transmission electron microscopy. At the ZnO/LAO interface, the Burgers vectors of misfit dislocations are identified to be 1/3[1¯21¯0] and 1/2[0001]. Threading dislocations with the Burgers vectors of 1/3⟨112¯0⟩ and ⟨0001⟩ are distributed on the basal plane. In (134¯0)ZnO film, the predominant planar defects are basal stacking faults (BSFs) with 1/6⟨202¯3⟩ displacement vectors. The densities of dislocations and BSFs are about 3.8 × 1010 cm−2 and 3.1 × 105 cm−1, respectively.


Journal of Vacuum Science and Technology | 2014

Defects in nonpolar (134¯0) ZnO epitaxial film grown on (114) LaAlO3 substrate

Tzu-Chun Yen; Wei-Lin Wang; Chun-Yen Peng; Jr-Sheng Tian; Yen-Teng Ho; Li Chang

The defects in (134¯0)ZnO epitaxial film grown on (114)LaAlO3 (LAO) have been systematically investigated by using transmission electron microscopy. At the ZnO/LAO interface, the Burgers vectors of misfit dislocations are identified to be 1/3[1¯21¯0] and 1/2[0001]. Threading dislocations with the Burgers vectors of 1/3⟨112¯0⟩ and ⟨0001⟩ are distributed on the basal plane. In (134¯0)ZnO film, the predominant planar defects are basal stacking faults (BSFs) with 1/6⟨202¯3⟩ displacement vectors. The densities of dislocations and BSFs are about 3.8 × 1010 cm−2 and 3.1 × 105 cm−1, respectively.


Surface & Coatings Technology | 2013

Structure and property of epitaxial titanium oxynitride grown on MgO(001) substrate by pulsed laser deposition

Hien Do; Yue-Han Wu; Van-Truong Dai; Chun-Yen Peng; Tzu-Chun Yen; Li Chang


Applied Surface Science | 2011

Epitaxial growth of titanium oxycarbide on MgO (001) substrates by pulsed laser deposition

Hien Do; Tzu-Chun Yen; Chih-Sheng Tian; Yue-Han Wu; Li Chang


Thin Solid Films | 2016

Atomically resolved interface structure between epitaxial TiN film and MgO substrate

Lin-Lung Wei; Tzu-Chun Yen; Hien Do; Li Chang


Materials Letters | 2013

The role of the interface structure on the growth of nonpolar (101¯0) and semipolar (112¯2¯) ZnO on (112) LaAlO3 substrates

Jr-Sheng Tian; Yue-Han Wu; Wei-Lin Wang; Tzu-Chun Yen; Yen-Teng Ho; Li Chang


Thin Solid Films | 2016

Single domain non-polar (123¯0)ZnO epitaxy on (118)LaAlO3 by pulsed laser deposition

Tzu-Chun Yen; Yen-Teng Ho; Chun-Yen Peng; Jr-Sheng Tian; Yi-Sen Shih; Lin-Lung Wei; Wei-Lin Wang; Kun-An Chiu; Li Chang

Collaboration


Dive into the Tzu-Chun Yen's collaboration.

Top Co-Authors

Avatar

Li Chang

National Chiao Tung University

View shared research outputs
Top Co-Authors

Avatar

Hien Do

National Chiao Tung University

View shared research outputs
Top Co-Authors

Avatar

Jr-Sheng Tian

National Chiao Tung University

View shared research outputs
Top Co-Authors

Avatar

Yen-Teng Ho

National Chiao Tung University

View shared research outputs
Top Co-Authors

Avatar

Chun-Yen Peng

National Chiao Tung University

View shared research outputs
Top Co-Authors

Avatar

Wei-Lin Wang

National Chiao Tung University

View shared research outputs
Top Co-Authors

Avatar

Yue-Han Wu

National Chiao Tung University

View shared research outputs
Top Co-Authors

Avatar

Lin-Lung Wei

National Chiao Tung University

View shared research outputs
Top Co-Authors

Avatar

Van-Truong Dai

National Chiao Tung University

View shared research outputs
Top Co-Authors

Avatar

Chien-Nan Hsiao

National Chiao Tung University

View shared research outputs
Researchain Logo
Decentralizing Knowledge