Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Ulf-Carsten Kirschstein is active.

Publication


Featured researches published by Ulf-Carsten Kirschstein.


Archive | 2001

Six-axis positioning system having a zero-magnetic-field space

Ulf-Carsten Kirschstein; Erik Beckert; Andrew Hoffmann; Christoph Schaeffel; Eugen Saffert; Johannes Zentner; Torsten Gramsch


Microelectronic Engineering | 2007

High resolution variable-shaped beam direct write

Peter Hahmann; Lutz Bettin; Monika Boettcher; Ulrich Denker; Thomas Elster; Steffen Jahr; Ulf-Carsten Kirschstein; Karl-Heinz Kliem; Bernd Schnabel


Archive | 1999

System for receiving and retaining a substrate

Ulf-Carsten Kirschstein; Stefan Risse; Christoph Damm


Archive | 2009

TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Boehm; René Bauer; Gerd Harnisch; Stefan Risse; Christoph Schenk


Archive | 2009

Aerostatically guided table system for vacuum application

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Boehm; René Bauer; Gerd Harnisch; Stefan Risse; Christoph Schenk


Archive | 2001

Six axes positioning system with a space free from magnetic field

Erik Beckert; Torsten Gramsch; Andrew Hoffmann; Ulf-Carsten Kirschstein; Eugen Saffert; Christoph Dr. Ing. Schäffel; Johannes Zentner


Archive | 1999

Holding device for a substrate

Gerhard Schubert; Ulf-Carsten Kirschstein; Stefan Dr. Risse; Gerd Harnisch; Gerhard Kalkowski; Volker Guyenot


Archive | 2009

Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Boehm; René Bauer; Gerd Harnisch; Stefan Risse; Christoph Schenk


Archive | 2009

Aerostatic bearing assembly with allocated electrostatic pretensioning unit, in particular for vacuum application

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Böhm; René Bauer; Gerd Harnisch; Schenk Christoph; Risse Stefan; Peschel Thomas


Archive | 2009

Aerostatisch geführtes Tischsystem für die Vakuumanwendung

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Böhm; René Bauer; Gerd Harnisch; Peschel Thomas; Risse Stefan; Schenk Christoph

Collaboration


Dive into the Ulf-Carsten Kirschstein's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge