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Ulf-Carsten Kirschstein

Leica Microsystems

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Publication

Featured researches published by Ulf-Carsten Kirschstein.

Archive | 2001

Six-axis positioning system having a zero-magnetic-field space

Ulf-Carsten Kirschstein; Erik Beckert; Andrew Hoffmann; Christoph Schaeffel; Eugen Saffert; Johannes Zentner; Torsten Gramsch

Microelectronic Engineering | 2007

High resolution variable-shaped beam direct write

Peter Hahmann; Lutz Bettin; Monika Boettcher; Ulrich Denker; Thomas Elster; Steffen Jahr; Ulf-Carsten Kirschstein; Karl-Heinz Kliem; Bernd Schnabel

Archive | 1999

System for receiving and retaining a substrate

Ulf-Carsten Kirschstein; Stefan Risse; Christoph Damm

Archive | 2009

TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Boehm; René Bauer; Gerd Harnisch; Stefan Risse; Christoph Schenk

Archive | 2009

Aerostatically guided table system for vacuum application

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Boehm; René Bauer; Gerd Harnisch; Stefan Risse; Christoph Schenk

Archive | 2001

Six axes positioning system with a space free from magnetic field

Erik Beckert; Torsten Gramsch; Andrew Hoffmann; Ulf-Carsten Kirschstein; Eugen Saffert; Christoph Dr. Ing. Schäffel; Johannes Zentner

Archive | 1999

Holding device for a substrate

Gerhard Schubert; Ulf-Carsten Kirschstein; Stefan Dr. Risse; Gerd Harnisch; Gerhard Kalkowski; Volker Guyenot

Archive | 2009

Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Boehm; René Bauer; Gerd Harnisch; Stefan Risse; Christoph Schenk

Archive | 2009

Aerostatic bearing assembly with allocated electrostatic pretensioning unit, in particular for vacuum application

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Böhm; René Bauer; Gerd Harnisch; Schenk Christoph; Risse Stefan; Peschel Thomas

Archive | 2009

Aerostatisch geführtes Tischsystem für die Vakuumanwendung

Gerhard Schubert; Christian Jackel; Ulf-Carsten Kirschstein; Michael Böhm; René Bauer; Gerd Harnisch; Peschel Thomas; Risse Stefan; Schenk Christoph

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Gerhard Schubert

Leica Microsystems

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Peschel Thomas

Leica Microsystems

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Risse Stefan

Leica Microsystems

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Schenk Christoph

Leica Microsystems

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Gerhard Kalkowski

Leica Microsystems

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Peter Hahmann

Leica Microsystems

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Thomas Elster

Leica Microsystems

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Andre Fortagne

Leica Microsystems

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Andrew Hoffmann

Leica Microsystems

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Dorothee Krauhs

Leica Microsystems

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