Uppili Sridhar

A high-sensitivity ribbed and bossed pressure transducer

Abstract Using ribs and bosses, a high-senstivity low non-linearity pressure sensor is demonstrated. The design method includes extensive use of finite-element simulation to optimize the geometries for both sensitivity and linearity. The structure uses a square cavity with a self-aligning rim to enhance manufacturability. The bosses are the same thickness as the rib, further enhancing manufacturability. The diaphragm is recessed. This maximizes the stress at the top surface of the rib, where the piezoresistors are placed.

A micromachined integratable thermal reactor

This paper presents a micromachined thermal reactor. The silicon substrate remains unheated because of the thermal isolation design during thermal cycling of the reaction chamber. The side-heating concept employed has significantly improved in-chamber temperature uniformity. Finite-element-analysis is carried out to optimise the thermal performance. Experimental results have proved that the thermal reactor can easily be integrated with other non-thermal components. Integration of the device with other components or modules of miniaturised total analysis systems (/spl mu/TAS) is very promising.