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Uwe Schüssler

Applied Materials

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Publication

Featured researches published by Uwe Schüssler.

Archive | 2005

Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates

Jörg Dr. Krempel-Hesse; Andreas Jischke; Uwe Schüssler; Hans Wolf

Archive | 2005

Coater with a large-area assembly of rotatable magnetrons

Stefan Bangert; Frank Fuchs; Ralph Lindenberg; Andreas Lopp; Uwe Schüssler; Tobias Stolley

Archive | 2004

Cathodic sputtering apparatus

Frank Fuchs; Stefan Bangert; Ralph Lindenberg; Helmut Grimm; Tobias Stolley; Uwe Schüssler

Archive | 1997

Device for retaining a flat substrate

Stefan Bangert; Michael König; Harald Krämer; Uwe Schüssler

Archive | 2004

Coating device with rotatable magnetrons covering large area

Stefan Bangert; Frank Fuchs; Ralph Lindenberg; Andreas Lopp; Uwe Schüssler; Tobias Stolley

Archive | 2005

Magnetron sputter cathode

Jörg Dr. Krempel-Hesse; Andreas Jischke; Uwe Schüssler; Hans Wolf

Archive | 2004

Coating plant with a charging lock and device therefor

Uwe Schüssler; Stefan Bangert; Jürgen Henrich

Archive | 2004

Cooled backing plate for a sputter target and sputter target made with several backing plates

Jörg Dr. Krempel-Hesse; Uwe Schüssler; Andreas Jischke; Hans Wolf

Archive | 2004

Drive mechanism for a vacuum treatment apparatus

Ralph Lindenberg; Michael König; Uwe Schüssler; Stefan Bangert

Archive | 2006

Vacuum closure with linear drive unit

Stefan Bangert; Michael König; Ralph Lindenberg; Uwe Schüssler; Tobias Stolley; Frank Fuchs

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Collaboration

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Stefan Bangert

Applied Materials

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Ralph Lindenberg

Applied Materials

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Frank Fuchs

Applied Materials

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Tobias Stolley

Applied Materials

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Jose Manuel Dieguez-Campo

Applied Materials

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Andreas Jischke

Applied Materials

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Hans Wolf

Applied Materials

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Jörg Dr. Krempel-Hesse

Applied Materials

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Andreas Lopp

Applied Materials

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Thomas Gebele

Applied Materials

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