V. Rochus

A Neural Probe With Up to 966 Electrodes and Up to 384 Configurable Channels in 0.13

<italic>In vivo</italic> recording of neural action-potential and local-field-potential signals requires the use of high-resolution penetrating probes. Several international initiatives to better understand the brain are driving technology efforts towards maximizing the number of recording sites while minimizing the neural probe dimensions. We designed and fabricated (0.13-<inline-formula><tex-math notation=LaTeX>

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m SOI CMOS

</tex-math></inline-formula>m SOI Al CMOS) a 384-channel configurable neural probe for large-scale <italic>in vivo</italic> recording of neural signals. Up to 966 selectable active electrodes were integrated along an implantable shank (70 <inline-formula> <tex-math notation=LaTeX>

Benchmarking time-of-flight based depth measurement techniques

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Influence of multiphysics couplings on the performance of a MEMS magnetometer

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A general multi-mode lumped equivalent circuit model for circular cMUT cells

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Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology

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Fast analytical design of MEMS capacitive pressure sensors with sealed cavities

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Design of a MZI Micro-Opto-Mechanical Pressure Sensor for a SiN photonics platform

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Fast analytical design of Poly-SiGe MEMS pressure sensors

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