Vedran Šimunović

Nano-calibration standard with multiple pitch and step height values

In 2011 Croatian National Laboratory for Length (HMI/FSB-LPMD) developed calibration standards which have been physically implemented in cooperation with the company MikroMasch Trading OU and the Ruđer Boskovic Institute. Specific design of standards makes them suitable for calibration of optical instruments, stylus instruments, scanning electron microscopes, atomic force microscopes and scanning tunnelling microscopes. Therefore, the developed calibration standards greatly contribute to the reproducibility of measurement results for groove depth well as the 2D and 3D roughness parameters obtained by various measuring methods. After a number of measurements conducted on developed standards, based on which new knowledge was acquired, HMI/FSB-LPMD designed a new standard for the field of dimensional nanometrology. This paper presents the design of a new standard that is still suitable for calibration of different types of measuring instruments, i.e. methods, but has a larger measurement capability in terms of measuring ranges in vertical and lateral direction.

Final report for the period 2007–2009 on the CCL-K11 ongoing key comparison

Lasers from nine national metrology institutes (NMIs) were compared as part of the CCL-K11 ongoing key comparison, initiated by the 13th meeting of the Comite Consultative des Longeurs (CCL) in 2007. The absolute frequency of the f component of the R(127) 11–5 transition of molecular iodine was measured for these lasers following the technical protocol for CCL-K11. The results of these measurements are compiled in the present report. Main text. To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the CIPM Mutual Recognition Arrangement (MRA).