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Virendra V. S. Rana

Applied Materials

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Publication

Featured researches published by Virendra V. S. Rana.

Archive | 1997

Method and apparatus for improving gap-fill capability using chemical and physical etchbacks

Soonil Hong; Choon Kun Ryu; Michael P Nault; Kaushal K. Singh; Anthony Lam; Virendra V. S. Rana; Andrew Conners

Archive | 1996

Method for submicron gap filling on a semiconductor substrate

Virendra V. S. Rana; Andrew Conners; Anand Gupta; Xin Guo; Soonil Hong

Archive | 1992

Metal chemical vapor deposition process using a shadow ring

Steve Ghanayem; Virendra V. S. Rana

Archive | 1999

Method and apparatus for improving film stability of halogen-doped silicon oxide films

Peter Wai-Man Lee; Stuardo Robles; Anand Gupta; Virendra V. S. Rana; Amrita Verma

Archive | 1992

Deposition apparatus using a perforated pumping plate

Ashok K. Sinha; Steve Ghanayem; Virendra V. S. Rana

Archive | 1994

Compound clamp ring for semiconductor wafers

Semyon Sherstinsky; Mei Chang; Charles C. Harris; Alan F. Morrison; Virendra V. S. Rana; James F. Roberts; Ashok K. Sinha; Simon W. Tam

Archive | 2009

Methods of making an emitter having a desired dopant profile

Virendra V. S. Rana; Robert Z. Bachrach

Archive | 1996

Method for improving film stability of fluorosilicate glass films

Mohan K. Bhan; Sudhakar Subrahmanyam; Anand Gupta; Virendra V. S. Rana

Archive | 2000

Apparatus for improving film stability of halogen-doped silicon oxide films

Peter Wai-Man Lee; Stuardo Robles; Anand Gupta; Virendra V. S. Rana; Amrita Verma

Archive | 2010

Dry cleaning of silicon surface for solar cell applications

Virendra V. S. Rana; Michael P. Stewart

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Anand Gupta

Applied Materials

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Robert Z. Bachrach

Applied Materials

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Michael P. Stewart

Applied Materials

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Amrita Verma

Applied Materials

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Chris Eberspacher

Applied Materials

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Zhenhua Zhang

Applied Materials

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Andrew Conners

Applied Materials

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Ashok K. Sinha

Applied Materials

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Mohan K. Bhan

Applied Materials

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Peter Wai-Man Lee

Applied Materials

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