Walter Dr Ing Lang

Electromechanical valveless microminiature pump - has membrane actuator for applying oscillation perpendicular to fluid flow and anisotropic structure e.g. mfd by etching of silicon wafer.

A catalytic gas sensor element

Verwendung einer mikroporösen Siliziumstruktur als photolumineszente Struktur

Plasma generating process and arrangement

Catalytic gas sensor and method of fabricating said sensor.

Micro-mechanical acceleration sensor with anti-stiction feature

Verfahren und anordnung zur plasma-erzeugung

Mikromechanischer Beschleunigungssensor Micro-mechanical acceleration sensor

Verfahren zum herstellen von elektrolumineszenten siliziumstrukturen A process for the manufacture of electroluminescent silicon structures

A process for the manufacture of electroluminescent silicon structures