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Dive into the research topics where Walter Glashauser is active.

Publication


Featured researches published by Walter Glashauser.


Archive | 2002

Arrangement and method for conditioning a polishing pad

Peter Faustmann; Walter Glashauser; Andreas Purath; Benno Utess


Archive | 2002

Method and configuration for conditioning a polishing pad surface

Walter Glashauser; Benno Utess; Andreas Purath


Archive | 2001

Wafer cleaning apparatus

Walter Glashauser; Lutz Teichgräber


Archive | 2003

Configuration for polishing disk-shaped objects

Katrin Ebner; Walter Glashauser


Archive | 2002

Method for adjusting polishing pad surface, and device thereof

Walter Glashauser; Andreas Purath; Benno Utess; プラス アンドレーアス; グラッスハウザー ヴァルター; ウーテス ベノ


Archive | 2001

Arrangement for polishing disk-like objects

Katrin Ebner; Walter Glashauser


Archive | 2001

Arrangement and method for mounting a backing film to a polish head

Katrin Ebner; David Erdmann; Walter Glashauser; Lutz Teichgräber


Archive | 2001

Arrangement and method for cleaning a semiconductor device

James Dougan; Walter Glashauser; Matthias Peschke; Olaf Storbeck; Olivier Vatel


Archive | 2001

Method for conditioning a polishing pad surface

Walter Glashauser; Benno Utess; Andreas Purath


Archive | 2001

Verfahren zur Konditionierung der Oberfläche eines Polierkissens

Walter Glashauser; Benno Utess; Andreas Purath

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