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Wataru Kusaki

Shin-Etsu Chemical

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Publication

Featured researches published by Wataru Kusaki.

Archive | 2001

Polymer, resist composition, and patterning process

Yuji Harada; Jun Hatakeyama; Takao Yoshihara; Wataru Kusaki; Tomohiro Kobayashi; Koji Hasegawa

Archive | 2007

RESIST MATERIAL AND PATTERNING PROCESS USING THE SAME

Yuji Harada; Jun Hatakeyama; Wataru Kusaki; Takao Yoshihara; 裕次 原田; 隆夫 吉原; 畠山 潤; 渉 草木

Archive | 2003

METHOD FOR PRODUCING MACROMOLECULAR COMPOUND, AND RESIST MATERIAL

Jun Hatakeyama; Wataru Kusaki; Takanobu Takeda; Osamu Watanabe; 隆信 武田; 渡邊 修; 畠山 潤; 渉 草木

Archive | 2002

Polymer compound, positive-type resist material and pattern forming method using the same

Jun Hatakeyama; Wataru Kusaki; Takanobu Takeda; Osamu Watanabe; 武田 隆信; 渡邊 修; 畠山 潤; 草木 渉

Archive | 2000

Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process

Youichi Ohsawa; Jun Watanabe; Wataru Kusaki; Satoshi Watanabe; Takeshi Nagata; Shigehiro Nagura

Archive | 2004

Nitrogen-containing organic compound, resist composition and patterning process

Takeru Watanabe; Youichi Ohsawa; Masaki Ohashi; Wataru Kusaki; Tomohiro Kobayashi

Archive | 2003

Negative resist material and pattern formation method using the same

Takanobu Takeda; Osamu Watanabe; Wataru Kusaki; Ryuji Koitabashi

Archive | 2001

New onium salt, photoacid generator for resist material, resist material and patterning method

Wataru Kusaki; Takashi Nagata; Shigehiro Nagura; Yoichi Osawa; Atsushi Watanabe; Satoshi Watanabe; 茂広 名倉; 洋一 大澤; 岳志 永田; 淳 渡辺; 聡 渡辺; 渉 草木

Archive | 2008

Method for manufacturing substrate for microarray

Wataru Kusaki; Takeshi Kinsho; Toshinobu Ishihara

Archive | 2008

Method for manufacturing substrate for making microarray

Wataru Kusaki; Takeshi Kinsho; Toshinobu Ishihara

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Collaboration

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Jun Hatakeyama

Shin-Etsu Chemical

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Osamu Watanabe

Shin-Etsu Chemical

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Satoshi Watanabe

Shin-Etsu Chemical

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Takanobu Takeda

Shin-Etsu Chemical

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Toshinobu Ishihara

Shin-Etsu Chemical

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Youichi Ohsawa

Shin-Etsu Chemical

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Shigehiro Nagura

Shin-Etsu Chemical

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Takeshi Kinsho

Shin-Etsu Chemical

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Takeshi Nagata

Shin-Etsu Chemical

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Jun Watanabe

Shin-Etsu Chemical

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