Wei Pan

Antimony/Graphitic Carbon Composite Anode for High-Performance Sodium-Ion Batteries.

Although the room-temperature rechargeable sodium-ion battery has emerged as an attractive alternative energy storage solution for large-scale deployment, major challenges toward practical sodium-ion battery technology remain including identification and engineering of anode materials that are both technologically feasible and economical. Herein, an antimony-based anode is developed by incorporating antimony into graphitic carbon matrices using low-cost materials and scalable processes. The composite anode exhibits excellent overall performance in terms of packing density, fast charge/discharge capability and cyclability, which is enabled by the conductive and compact graphitic network. A full cell design featuring this composite anode with a hexacyanometallate cathode achieves superior power output and low polarization, which offers the potential for realizing a high-performance, cost-effective sodium-ion battery.

Study of SiH 4 -based PECVD Low-k Carbon-doped Silicon Oxide

In previous studies, low-k carbon-doped silicon oxide (SiOC) films were deposited using organosilicon precursor: (CH 3 ) x SiH 4−x . In this paper, we present the properties of PECVD low-k SiOC films produced by using conventional SiH 4 based gas precursors. The SiH 4 based SiOC films have similar gross physical and electrical characteristics to those of (CH 3 ) x SiH 4−x based SiOC. Since the precursors are inexpensive, commercially available and convenient to operate for existing tools, the process should not require additional cost as compared with that of PECVD silicon dioxide. We demonstrate the feasibility of integrating Cu with SiOC on damascene interconnection. The evaluation on electrical performance of the Cu/SiOC based damascene structure will be discussed.