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Dive into the research topics where William A. Bagley is active.

Publication


Featured researches published by William A. Bagley.


Archive | 2003

Tunable gas distribution plate assembly

Wendell T. Blonigan; John M. White; William A. Bagley


Archive | 2001

Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications

William A. Bagley; Ericka M. Ramirez; Stephen C. Wolgast


Archive | 2005

Active cooling substrate support

Samuel Leung; Su Ho Cho; William A. Bagley


Archive | 2008

Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate

William A. Bagley; Paohuei Lee; Kyung-tae Kim; Sam-Kyung Kim; Toshio Kiyotake; Sam H. Kim; Takayuki Matsumoto; Jonathan Erik Larson; Makoto Inagawa; James Hoffman; Billy C. Leung


Archive | 2003

Substrate support and method of fabricating the same

Naomi Matsumura; Masahiko Kowaka; William A. Bagley; Akira Terashi; Hideaki Kondo


Archive | 2002

Smooth multipart substrate support member for cvd

William A. Bagley; Ericka M. Ramirez; Stephen C. Wolgast


Archive | 2006

VERTICALLY MOUNTED ROTARY CATHODES IN SPUTTERING SYSTEM ON ELEVATED RAILS

Samuel Leung; Andreas Geiss; Toshio Kiyotake; Erkan Koparal; Jose Albor; William A. Bagley


Archive | 2003

Pedestal for flat panel display applications

William A. Bagley; Ericka M. Ramirez; Stephen C. Wolgast


Archive | 2007

ELECTRONIC DEVICE MANUFACTURING COMPONENT WITH AN EMBEDDED CHIP AND METHODS OF USING THE SAME

William A. Bagley; Paohuei Lee; Suhail Anwar; Janusz Jozwiak


Archive | 2007

METHODS AND APPARATUS FOR USING A REINFORCED DIFFUSER IN SUBSTRATE PROCESSING

William A. Bagley; Toshio Kiyotake; Masahiko Kowaka

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