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William D. Lee

Axcelis Technologies

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Publication

Featured researches published by William D. Lee.

Archive | 2006

Annulus clamping and backside gas cooled electrostatic chuck

Teng Chao D. Tao; William D. Lee; Marvin R. LaFontaine; Ashwin M. Purohit

Archive | 2008

Electrostatic chuck with compliant coat

Ashwin M. Purohit; Marvin R. LaFontaine; William D. Lee; Richard J. Rzeszut

Archive | 2008

WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS

Marvin R. LaFontaine; Ari Eiriksson; Ashwin M. Purohit; William D. Lee

Archive | 2011

Post Implant Wafer Heating Using Light

William D. Lee; Marvin Farley; William F. Divergilio

Archive | 2011

ACTIVE DEW POINT SENSING AND LOAD LOCK VENTING TO PREVENT CONDENSATION ON WORKPIECES

William D. Lee

Archive | 2010

Vapor Compression Refridgeration Chuck for Ion Implanters

William D. Lee; Ashwin M. Purohit; Marvin R. LaFontaine

Archive | 2008

GAS BEARING ELECTROSTATIC CHUCK

William D. Lee; Marvin R. LaFontaine; Ashwin M. Purohit; Joseph Gillespie; Donovan Beckel; Teng Chao Tao; Alexander H. Slocum; Samir Nayfeh

Archive | 2012

IN-VACUUM HIGH SPEED PRE-CHILL AND POST-HEAT STATIONS

William D. Lee; William P. Reynolds; Stanley W. Stone

Archive | 2013

Inert atmospheric pressure pre-chill and post-heat

William D. Lee; Steve Drummond

Archive | 2011

Heated rotary seal and bearing for chilled ion implantation system

William D. Lee; William F. Divergilio; Steve Drummond

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Collaboration

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Ashwin M. Purohit

Axcelis Technologies

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Marvin R. LaFontaine

Axcelis Technologies

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Steve Drummond

Axcelis Technologies

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William F. Divergilio

Axcelis Technologies

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Richard J. Rzeszut

Axcelis Technologies

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William P. Reynolds

Axcelis Technologies

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Alexander H. Slocum

Massachusetts Institute of Technology

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Ari Eiriksson

Axcelis Technologies

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Daniel R. Tieger

Axcelis Technologies

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David B. Smith

Axcelis Technologies

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