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Xalter Stefan

Carl Zeiss AG

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Publication

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Archive | 2002

System zur Dämpfung von Schwingungen

Sorg Franz; Xalter Stefan; Muehlbeyer Michael; Gellrich Bernhard; Melzer Frank; Ittner Thomas

Archive | 2001

Optical arrangement has optical element, projection light source and compensation light feed device coupled to optical element via peripheral surface of optical element

Schuster Karl-Heinz; Holderer Hubert; Buenau Rudolf; Wagner Christian; Becker Jochen; Xalter Stefan

Archive | 2002

System zur Beseitigung oder wenigstens Dämpfung von Schwingungen

Sorg Franz; Xalter Stefan; Melzer Frank; Gellrich Bernhard; Muehlbeyer Michael

Archive | 2014

BELEUCHTUNGSSYSTEM EINER MIKROLITHOGRAPHISCHEN PROJEKTIONSBELICHTUNGSANLAGE

Latzel Martin; Hauf Markus; Kwan Yim-Bun-Patrick; Xalter Stefan

Archive | 2002

SYSTEM FOR MAKING VIBRATION BUFFER

Sorg Franz; Xalter Stefan; Melzer Frank; Gellrich Bernhard; Muehlbeyer Michael

Archive | 2010

Kontaminationsarme optische Anordnung

Kwan Yim-Bun-Patrick; Xalter Stefan

Archive | 2008

Metrology apparatus for mask used with lithographic projection apparatus and used for manufacturing integrated circuits has mask holder which supports mask along horizontal edge of mask with uniformly distributed force against gravity

Kwan Yim-Bun Patrick; Xalter Stefan

Archive | 2001

OPTICAL ARRANGEMENT APPARATUS

Becker Jochen; Holderer Hubert; Huemmel Wolfgang; Mueller-Rissmann Werner; Von Buenau Rudolf; Wagner Christian; Xalter Stefan

Archive | 2017

OPTISCHES SYSTEM, OPTISCHE ANORDNUNG UND LITHOGRAPHIEANLAGE

Deufel Peter; Xalter Stefan; Kulitzki Viktor

Archive | 2017

CONNECTION ARRANGEMENT FOR A FORCE-FIT CONNECTION BETWEEN CERAMIC COMPONENTS

Siegmanski Karsten; Deufel Peter; Kulytskyy Viktor; Xalter Stefan; Gellrich Bernhard

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Gellrich Bernhard

Carl Zeiss AG

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Kwan Yim-Bun Patrick

Carl Zeiss AG

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Kwan Yim-Bun-Patrick

Carl Zeiss AG

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Becker Jochen

Carl Zeiss AG

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Deufel Peter

Carl Zeiss AG

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Holderer Hubert

Carl Zeiss AG

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Melzer Frank

Carl Zeiss AG

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Muehlbeyer Michael

Carl Zeiss AG

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Sorg Franz

Carl Zeiss AG

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Wagner Christian

Carl Zeiss AG

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