Yang Xiuying

Morphology and properties of PZT nanoparticle modified PZT thick film by alternative spinning

ABSTRACT The present work focused on the study of morphology, crystalline structure and the ferroelectric properties of PZT thick film, which was modified with PZT nanoparticles and prepared by alternative spinning technique. The experimental results showed that the alternative spinning technique not only improved the film thickness, but also solved the problem on the membrane surface roughness of the thick film prepared by PZT 0–3 composite sol method. The results also confirmed that the electrical properties depended strongly on the annealing temperature and film thickness. With the increase of the annealing temperature, Pr increased and Ec changed inconspicuously. When the thickness of PZT thick film increased, Ec decreased but Pr increased. For the 4 µm-thick film, Ec and Pr were 23 kV/cm and 60 µC/cm2, respectively. These results suggest that the modified PZT thick film has a potential application on the fabrication of micro-devices because it provides good ferroelectricity, dielectricity and piezoelectricity.