Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Yasuaki Murata.
Japanese Journal of Applied Physics | 1994
Atsushi Yoshinouchi; Akihiro Oda; Yasuaki Murata; Tatsuo Morita; Shuhei Tsuchimoto
Source/drain formation by ion doping using self-activation technique without thermal anneal on polysilicon thin film transistors (TFTs) have been investigated. Phosphorus ions and protons were simultaneously implanted into polysilicon films. At total ion doses over 8×1015 ions/cm2, resistivities of self-activated films have been found equal to those of the ones annealed after the implantation. This self-activation technique enabled us to fabricate self-aligned TFTs having low-resistance Al gates and, at the same time, to hydrogenate active layers. With the case of self-activation technique, field-effect mobilities as high as 58 and 49 cm2/(Vs) were achieved in n-channel and p-channel TFTs, respectively, fabricated on glass substrates.
Japanese Journal of Applied Physics | 1992
Masamitsu Haruna; Yasuaki Murata; Hiroshi Nishihara
A novel photoresist-free process used for fabrication of Ti:LiNbO3 waveguides is proposed and demonstrated. In this process, smooth waveguide patterning of TiO2 channels can be performed by laser-beam (LB) direct writing at up to 0.2 mm/s, where Ti film deposited on LiNbO3 is thermally oxidized in air by the focused Ar+ laser beam. LB writing has sufficiently high accuracy for waveguide patterning because the Ti film thickness is usually below 0.1 µm. Unlike the previously reported resist-free processes, the process demonstrated here does not require any specific tools or materials, and can provide Ti:LiNbO3 waveguides more easily. It was also confirmed that there are no marked differences in guiding properties between two Ti:LiNbO3 waveguides fabricated by the proposed resist-free process and the standard process based on waveguide patterning in photoresist as thick as 1 µm.
Archive | 2000
Masataka Ito; Yasuaki Murata; 政隆 伊藤; 康明 村田
Archive | 1997
Atsushi Yoshinouchi; Yasuaki Murata
Archive | 1993
Atsushi Yoshinouchi; Tatsuo Morita; Shuhei Tsuchimoto; Yasuaki Murata
Archive | 1994
Yasuaki Murata; Atsushi Yoshinouchi; 康明 村田; 淳 芳之内
Archive | 1992
Masataka Ito; Tatsuo Morita; Yasuaki Murata; 政隆 伊藤; 康明 村田; 達夫 森田
Archive | 1996
Masahiro Fujiwara; Yasuaki Murata; 康明 村田; 正弘 藤原
Archive | 2000
Atsushi Yoshinouchi; Yasuaki Murata
Archive | 1994
Yasuaki Murata; Atsushi Yoshinouchi; 康明 村田; 淳 芳之内