Yasunori Saotome
Tohoku University
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Publication
Featured researches published by Yasunori Saotome.
MRS Proceedings | 1998
Yasunori Saotome; Tao Zhang; Akihisa Inoue
Microformability of new amorphous alloys in the supercooled liquid state and microforming techniques for the materials are shown. In the supercooled liquid state, the materials reveal perfect Newtonian viscous flow characteristics and furthermore exhibit an excellent property of microformability on a submicron scale. As for microforming techniques, microforging and micro extrusion of amorphous alloys are introduced in addition to the fabrication method of micro dies of photochemically machinable glass. As a result, amorphous alloys are expected as one of the most useful materials to fabricate micromachines.
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena | 2012
Yasuyuki Fukuda; Yasunori Saotome; Nobuyuki Nishiyama; Kana Takenaka; Noriko Saidoh; Eiichi Makabe; Akihisa Inoue
Here, the authors fabricated a mold consisting of nanodot arrays with an 18-nm pitch and performed nanoimprinting of metallic glass for developing bitpatterned media (BPM) with an areal recording density of 2 Tbit/in.2. Specifically, they investigated the feasibility of SiO2/Si mold fabrication by metal mask patterning with focused ion beam assisted chemical vapor deposition (FIB-CVD) and reactive ion etching (RIE). SiO2 was etched with a mixed gas of CHF3 and O2, resulting in successful fabrication of convex nanodot arrays with an 18-nm pitch. The authors attempted nanoimprinting of Pd-based metallic glass with the fabricated SiO2 mold and clearly confirmed the replication of the fine nanohole pattern. These results suggest that the proposed FIB-CVD and RIE process is a promising method for fabricating ultrafine nanodot arrays and that metallic glasses are excellent nanoimprintable materials for mass-produced nanodevices such as BPM with ultrahigh recording density.
internaltional ultrasonics symposium | 2009
Jiromaru Tsujino; Yasunori Saotome; Noboru Shimada; Eiichi Sugimoto
−20 kHz ultrasonic vibration compacting system with 15-mm-diameter upper and lower vibration punches and a radial vibration die, and 20 kHz vibration compacting system using 5-mm-diameter upper and lower vibration punches are studied. Compacting of metal, alloy and ceramics powder is important process for powder metallurgy which is used for producing small and precise mechanical parts and required for various industry fields including electronics. Some complex metal alloy, amorphous alloy and fine ceramic powder such as zirconium are impossible to compact using only static pressure. Various powder are compacted with larger density and more uniform distribution compared that without vibration.
Japanese Journal of Applied Physics | 2012
Yasuyuki Fukuda; Yasunori Saotome; Nobuyuki Nishiyama; Noriko Saidoh; Eiichi Makabe; Akihisa Inoue
Here we attempted to fabricate molds (dies) of nanodot arrays with a 25-nm pitch and to nanoimprint metallic glass for developing bit-patterned media with an ultrahigh recording density of 1 Tbit/in.2. The mold-fabricating process consisted of mask patterning by focused ion beam assisted chemical vapor deposition (FIB-CVD) and reactive ion etching (RIE). We investigated the feasibility of a Pt-deposited metal etching mask on SiO2 on Si and diamond like carbon (DLC) on Al2O3 substrates, and achieved isolated convex nanodot arrays with a 25-nm pitch and an aspect ratio of 1.8 by RIE with O2 plasma on a DLC/Al2O3 substrate. Subsequently, we nanoimprinted Pt-based metallic glass by using the fabricated molds and successfully replicated fine concave nanohole arrays. The results suggest that the FIB-CVD/RIE process is a promising technique for fabricating ultrafine nanopatterned molds, and metallic glasses are ideal nanoimprintable materials for mass producing nanodevices such as bit-patterned media.
Scripta Materialia | 2009
W. Zhang; Hai Guo; Mingwei Chen; Yasunori Saotome; Chunling Qin; Akihisa Inoue
Archive | 2011
Ryurou Kurahashi; Tsunehiro Mimura; Kenji Amiya; Yasunori Saotome
Materials Transactions | 2012
Masahiro Komaki; Tsunehiro Mimura; Ryurou Kurahasi; Hirotaka Odahara; Kenji Amiya; Yasunori Saotome; Tohru Yamasaki
Metallurgical and Materials Transactions A-physical Metallurgy and Materials Science | 2011
H. Guo; W. Zhang; Mingwei Chen; Yasunori Saotome; Mikio Fukuhara; Akihisa Inoue
Journal of Alloys and Compounds | 2011
Nobuyuki Nishiyama; Kana Takenaka; Noriko Saidoh; Masaaki Futamoto; Yasunori Saotome; Akihisa Inoue
Materials Transactions | 2011
Yasuyuki Fukuda; Yasunori Saotome; Hisamichi Kimura; Akihisa Inoue