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Dive into the research topics where Yen-Di Tsen is active.

Publication


Featured researches published by Yen-Di Tsen.


Archive | 2012

Semiconductor processing dispatch control

Sunny Wu; Yen-Di Tsen; Chun-Hsien Lin; Keung Hui; Jo Fei Wang; Jong-I Mou


Archive | 2012

Method of Optimizing Design for Manufacturing (DFM)

Keuing Hui; Yen-Wei Cheng; Yen-Di Tsen; Jong-I Mou; Chin-Hsiang Lin


Archive | 2010

APPARATUS AND METHOD FOR TARGET THICKNESS AND SURFACE PROFILE UNIFORMITY CONTROL OF MULTI-HEAD CHEMICAL MECHANICAL POLISHING PROCESS

Keung Hui; Jin-Ning Sung; Huang Soon Kang; Yen-Di Tsen; Jong-I Mou


Archive | 2010

Physical failure analysis guiding methods

Sunny Wu; Yen-Di Tsen; Monghsung Chuang; Fu-Min Huang; Jo Fei Wang; Jong-I Mou


Archive | 2014

Scanner overlay correction system and method

Yen-Di Tsen; Shin-Rung Lu; Jong-I Mou


Archive | 2013

Overlay abnormality gating by Z data

Chun-Hsien Lin; Kuo-Hung Chao; Yi-Ping Hsieh; Yen-Di Tsen; Jui-Chun Peng; Heng-Hsin Liu; Jong-I Mou


Archive | 2010

APC model extension using existing APC models

Po-Feng Tsai; Yen-Di Tsen; Jo Fei Wang; Jong-I Mou


Archive | 2015

Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes

Jui-Long Chen; Hui-Yun Chao; Yen-Di Tsen; Jong-I Mou


Archive | 2012

Defense system in advanced process control

Shin-Rung Lu; Chih Ming Hong; Yen-Di Tsen


Archive | 2015

Apparatus and Method for Chemical Mechanical Polishing Process Control

Keung Hui; Jin-Ning Sung; Jong-I Mou; Soon-Kang Huang; Yen-Di Tsen

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