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Jo Fei Wang

TSMC

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Publication

Featured researches published by Jo Fei Wang.

Archive | 2013

Multi-zone temperature control for semiconductor wafer

Chun-Lin Chang; Hsin-Hsien Wu; Zin-Chang Wei; Chi-Ming Yang; Chyi Shyuan Chern; Jun-Lin Yeh; Jih-Jse Lin; Jo Fei Wang; Ming-Yu Fan; Jong-I Mou

Archive | 2009

System and method for implementing a wafer acceptance test ("wat") advanced process control ("apc") with novel sampling policy and architecture

Andy Tsen; Jo Fei Wang; Po-Feng Tsai; Ming-Yu Fan; Jill Wang; Jong-I Mou; Sunny Wu

Archive | 2009

Method for bin-based control

Sunny Wu; Chih-Sheng Shih; Andy Tsen; Jo Fei Wang; Jong-I Mou; Hsin Kuan

Archive | 2013

Adaptive and automatic determination of system parameters

Po-Feng Tsai; Chia-Tong Ho; Sunny Wu; Jo Fei Wang; Jong-I Mou

Archive | 2012

Semiconductor processing dispatch control

Sunny Wu; Yen-Di Tsen; Chun-Hsien Lin; Keung Hui; Jo Fei Wang; Jong-I Mou

Archive | 2012

QUALITATIVE FAULT DETECTION AND CLASSIFICATION SYSTEM FOR TOOL CONDITION MONITORING AND ASSOCIATED METHODS

Chia-Tong Ho; Po-Feng Tsai; Jung-Chang Chen; Tze-Liang Lee; Jo Fei Wang; Jong-I Mou; Chin-Hsiang Lin

Archive | 2009

METHOD AND SYSTEM OF MONITORING E-BEAM OVERLAY AND PROVIDING ADVANCED PROCESS CONTROL

Jo Fei Wang; Ming-Yu Fan; Jong-I Mou

Archive | 2013

TOOL OPTIMIZING TUNING SYSTEMS AND ASSOCIATED METHODS

Po-Feng Tsai; Chia-Tong Ho; Sunny Wu; Jo Fei Wang; Jong-I Mou; Chin-Hsiang Lin

Archive | 2010

E-CHUCK FOR AUTOMATED CLAMPED FORCE ADJUSTMENT AND CALIBRATION

Jo Fei Wang; Sunny Wu; Jong-I Mou

Archive | 2011

Method and system for tool condition monitoring

Po-Feng Tsai; Chia-Tong Ho; Sunny Wu; Jo Fei Wang; Jong-I Mou; Chin-Hsiang Lin

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Collaboration

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Jong-I Mou

TSMC

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Sunny Wu

TSMC

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Po-Feng Tsai

TSMC

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Chin-Hsiang Lin

TSMC

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Chia-Tong Ho

TSMC

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Yen-Di Tsen

TSMC

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Andy Tsen

TSMC

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Chun-Hsien Lin

TSMC

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Ming-Yu Fan

TSMC

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Chih-Wei Hsu

TSMC

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