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Yeuk-Fai Edwin Mok

Applied Materials

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Publication

Featured researches published by Yeuk-Fai Edwin Mok.

Archive | 2002

Electroless deposition apparatus

Joseph J. Stevens; Dmitry Lubomirsky; Ian A. Pancham; Donald J. K. Olgado; Howard Grunes; Yeuk-Fai Edwin Mok

Archive | 1999

Edge bead removal/spin rinse dry (EBR/SRD) module

Joe Stevens; Donald J. K. Olgado; Alexander Sou-Kang Ko; Yeuk-Fai Edwin Mok

Archive | 2003

Multi-chemistry plating system

Michael X. Yang; Ming Xi; Russell C. Ellwanger; Eric B. Britcher; Bernardo Donoso; Lily L. Pang; Svetlana Sherman; Henry Ho; Anh N. Nguyen; Alexander N. Lerner; Allen L. D'Ambra; Arulkumar Shanmugasundram; Tetsuya Ishikawa; Yevgeniy Rabinovich; Dmitry Lubomirsky; Yeuk-Fai Edwin Mok; Son T. Nguyen

Archive | 2001

Electroless plating system

Joseph J. Stevens; Dmitry Lubomirsky; Ian A. Pancham; Donald J. K. Olgado; Howard Grunes; Yeuk-Fai Edwin Mok; Girish Dixit

Archive | 2003

Method and apparatus for self-calibration of a substrate handling robot

Bernardo Donoso; Yeuk-Fai Edwin Mok; Vincent E. Burkhardt

Archive | 2001

Integrated semiconductor substrate bevel cleaning apparatus and method

Yeuk-Fai Edwin Mok; Alexander Sou-Kang Ko; Bernardo Donoso; Joseph J. Stevens

Archive | 2000

Method and apparatus for transferring and supporting a substrate

Danny Wang; Dmitry Lubomirsky; Erwin Polar; Brigitte C. Stoehr; Mark Wiltse; Yeuk-Fai Edwin Mok; Frank C. Ma

Archive | 2000

Plasma reactor with multiple small internal inductive antennas

Yan Ye; Allan D'Ambra; Yeuk-Fai Edwin Mok; Richard E. Remmington; James E. Sammons

Archive | 1999

Method and apparatus for thermal control of a semiconductor substrate

Yeuk-Fai Edwin Mok; Dmitry Lubomirsky; Dennis Koosau; Danny Wang; Senh Thach; Paul Exline

Archive | 1999

Plasma reactor with internal inductive antenna capable of generating helicon wave

Yan Ye; Allan D'Ambra; Yeuk-Fai Edwin Mok; Richard E. Remington; James E. Sammons

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Dmitry Lubomirsky

Applied Materials

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Donald J. K. Olgado

Applied Materials

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Danny Wang

Applied Materials

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Joseph J. Stevens

Applied Materials

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Alexander Sou-Kang Ko

Applied Materials

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Bernardo Donoso

Applied Materials

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Ian A. Pancham

Applied Materials

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Allen L. D'Ambra

Applied Materials

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Erwin Polar

Applied Materials

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Frank C. Ma

Applied Materials

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