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Dive into the research topics where Allen L. D'Ambra is active.

Publication


Featured researches published by Allen L. D'Ambra.


Archive | 2006

Integrated electroless deposition system

Dmitry Lubomirsky; Arulkumar Shanmugasundram; Allen L. D'Ambra; Timothy W. Weidman; Eugene Rabinovich; Svetlana Sherman; Manoocher Birang; Yaxin Wang; Michael Yang; Bradley Hansen


Archive | 2003

Multi-chemistry plating system

Michael X. Yang; Ming Xi; Russell C. Ellwanger; Eric B. Britcher; Bernardo Donoso; Lily L. Pang; Svetlana Sherman; Henry Ho; Anh N. Nguyen; Alexander N. Lerner; Allen L. D'Ambra; Arulkumar Shanmugasundram; Tetsuya Ishikawa; Yevgeniy Rabinovich; Dmitry Lubomirsky; Yeuk-Fai Edwin Mok; Son T. Nguyen


Archive | 1999

Dual buffer chamber cluster tool for semiconductor wafer processing

Avi Tepman; Donald J. K. Olgado; Allen L. D'Ambra


Archive | 2005

Closed loop control on liquid delivery system ECP slim cell

Roy C. Nangoy; Allen L. D'Ambra; Yevgeniy Rabinovich; David Z. Chen; Tao Li


Archive | 2000

Apparatus and method for electro chemical deposition

Joseph J. Stevens; Yevgeniy Rabinovich; Sandy S. Chao; Mark Denome; Allen L. D'Ambra; Donald J. K. Olgado


Archive | 2009

Polishing system having a track

Alpay Yilmaz; Allen L. D'Ambra; Jagan Rangarajan; Lakshmanan Karuppiah


Archive | 2009

MULTIPLE WINDOW PAD ASSEMBLY

Alpay Yilmaz; Allen L. D'Ambra; Hung Chih Chen; Boguslaw A. Swedek


Archive | 2009

High throughput chemical mechanical polishing system

Allen L. D'Ambra; Alpay Yilmaz


Archive | 2004

Slim cell platform plumbing

Allen L. D'Ambra; Arulkumar Shanmugasundram; Michael X. Yang; Yevgeniy Rabinovich; Dmitry Lubomirsky


Archive | 2011

DISK-BRUSH CLEANER MODULE WITH FLUID JET

Hui Chen; Allen L. D'Ambra; Sen-Hou Ko; Yufei Chen; Adrian Blank; Mario Dave Silvetti; Geraldo J. Alonzo; Lakshmanan Karuppiah

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