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Yoko Miyazaki

Mitsubishi

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Publication

Featured researches published by Yoko Miyazaki.

Archive | 1997

Inspection data analyzing apparatus for in-line inspection with enhanced display of inspection results

Yoko Miyazaki; Nobuyoshi Hattori; Junko Izumitani; Masahiko Ikeno

Archive | 2000

System and method for inspecting pattern defect

Yoko Miyazaki

Archive | 1991

Pattern defect detection device and a spatial frequency filter used therein

Yoko Miyazaki; Toshimasa Tomoda; Hitoshi Tanaka; Nobuyuki Kosaka; Toyomi Ohshige

Archive | 2001

Inspection apparatus for foreign matter and pattern defect

Yoko Miyazaki; Toshiaki Mugibayashi

Archive | 2001

Inspection analyzing apparatus and semiconductor device

Kyoko Asahina; Yoko Miyazaki; Kaoru Yamana

Archive | 1996

Inspection data analyzing/processing system for inline inspection

Nobumi Hattori; Masahiko Ikeno; Junko Izumitani; Yoko Miyazaki; 陽子 宮崎; 信美 服部; 昌彦 池野; 淳子 泉谷

Archive | 1991

Inspection device for detecting defects in a periodic pattern on a semiconductor wafer

Yoko Miyazaki; Hitoshi Tanaka; Nobuyuki Kosaka; Toshimasa Tomoda

Archive | 1993

Method of manufacturing a spatial frequency filter for use in a pattern defect detection device

Yoko Miyazaki; Toshimasa Tomoda; Hitoshi Tanaka; Nobuyuki Kosaka; Toyomi Ohshige

Archive | 1998

Alignment method and semiconductor device

Toshiaki Mugibayashi; Yoko Miyazaki

Archive | 1988

Device for checking pattern defect

Noriyuki Kosaka; Yoko Miyazaki; Hitoshi Tanaka

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Collaboration

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Hitoshi Tanaka

Mitsubishi

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Nobuyuki Kosaka

Mitsubishi Electric

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Toshimasa Tomoda

Mitsubishi Electric

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Toyomi Ohshige

Mitsubishi

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Toshiaki Mugibayashi

Mitsubishi

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Yukiomi Kishimoto

Osaka Kyoiku University

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Junko Izumitani

Mitsubishi

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Keiko Nagaishi

Kyoto Prefectural University

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Kumiko Ohmoto

Osaka Kyoiku University

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Mami Omote

Kyoto Women's University

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