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Dive into the research topics where Yoshihide Tada is active.

Publication


Featured researches published by Yoshihide Tada.


Archive | 2002

Method for producing material of electronic device

Takuya Sugawara; Toshio Nakanishi; Shigenori Ozaki; Seiji Matsuyama; Shigemi Murakawa; Yoshihide Tada


Archive | 2003

Method for forming insulation film

Takuya Sugawara; Yoshihide Tada; Genji Nakamura; Shigenori Ozaki; Toshio Nakanishi; Masaru Sasaki; Seiji Matsuyama


Archive | 2002

Method and apparatus for forming insulating film containing silicon oxy-nitride

Genji Nakamura; Yoshihide Tada; Masayuki Imai; Asami Suemura; Shingo Hishiya


Archive | 2004

Semiconductor manufacturing apparatus and heat treatment method

Masahiro Shimizu; Yusaku Kashiwagi; Gishi Chung; Yoshihide Tada; Genji Nakamura


Archive | 2009

Method of modifying insulating film

Takuya Sugawara; Yoshihide Tada; Genji Nakamura; Shigenori Ozaki; Toshio Nakanishi; Masaru Sasaki; Seiji Matsuyama; Kazuhide Hasebe; Shigeru Nakajima; Tomonori Fujiwara


Archive | 2002

Method of producing electronic device material

Takuya Sugawara; Toshio Nakanishi; Shigenori Ozaki; Seiji Matsuyama; Shigemi Murakawa; Yoshihide Tada


Archive | 2003

Method for forming underlying insulation film

Takuya Sugawara; Yoshihide Tada; Genji Nakamura; Shigenori Ozaki; Toshio Nakanishi; Masaru Sasaki; Seiji Matsuyama; Kazuhide Hasebe; Shigeru Nakajima; Tomonori Fujiwara


Archive | 2005

Process for producing materials for electronic device

Takuya Sugawara; Toshio Nakanishi; Shigenori Ozaki; Seiji Matsuyama; Shigemi Murakawa; Yoshihide Tada


The Japan Society of Applied Physics | 2002

Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

Takuya Sugawara; Toshio Nakanishi; Masaru Sasaki; Shigenori Ozaki; Yoshihide Tada


The Japan Society of Applied Physics | 2002

A New Plasma Dry Cleaning Method Applied to Contact and Gate Pre Cleaning

Kotaro Miyatani; Kenichi Nishizawa; Yasuo Kobayashi; Yoshihide Tada

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